Inline process analysis and control using optical measurement for the ultra-short pulse laser ablation of CAD designed microstructures

2015 ◽  
Author(s):  
Marco Smarra ◽  
Jens Hildenhagen ◽  
Klaus Dickmann
Keyword(s):  
Laser Ablation ◽  
Pulse Laser ◽  
Pulse Laser Ablation ◽  
Optical Measurement ◽  
Short Pulse ◽  
Process Analysis ◽  
Short Pulse Laser ◽  
Ultra Short Pulse ◽  
And Control ◽  
Ultra Short Pulse Laser

Silicon Thinning using Ultra-Short Pulse Laser Ablation

2004 ◽  
Author(s):  
F. Beaudoin ◽  
P. Perdu ◽  
C. DeNardi ◽  
R. Desplats ◽  
J. Lopez ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Sample Preparation ◽  
Pulse Laser ◽  
Pulse Laser Ablation ◽  
Short Pulse ◽  
Special Care ◽  
Short Pulse Laser ◽  
Ultra Short Pulse ◽  
Ultra Short Pulse Laser

Abstract Ultra-short pulse laser ablation is applied to IC backside sample preparation. It is contact-less, non-thermal, precise and can ablate the various types of material present in IC packages. This study concerns the optimization of ultra-short pulse laser ablation for silicon thinning. Uncontrolled silicon roughness and poor uniformity of the laser thinned cavity needed to be tackled. Special care is taken to minimize the silicon RMS roughness to less than 1µm. Application to sample preparation of 256Mbit devices is presented.

Ultra-short pulse laser ablation of metals: threshold fluence, incubation coefficient and ablation rates

2010 ◽  
Vol 101 (1) ◽  
pp. 97-101 ◽  
Author(s):  
Jeppe Byskov-Nielsen ◽  
Juha-Matti Savolainen ◽  
Martin Snogdahl Christensen ◽  
Peter Balling
Keyword(s):  
Laser Ablation ◽  
Pulse Laser ◽  
Pulse Laser Ablation ◽  
Short Pulse ◽  
Threshold Fluence ◽  
Short Pulse Laser ◽  
Ultra Short Pulse ◽  
Ultra Short Pulse Laser

scholarly journals Ultra-short-pulse laser ablation and modification of fully sprayed single walled carbon nanotube networks

Carbon ◽  
2018 ◽  
Vol 138 ◽  
pp. 234-242 ◽  
Author(s):  
Maximilian Spellauge ◽  
Florin-Cristian Loghin ◽  
Jürgen Sotrop ◽  
Matthias Domke ◽  
Marco Bobinger ◽  
...  
Keyword(s):  
Carbon Nanotube ◽  
Laser Ablation ◽  
Pulse Laser ◽  
Pulse Laser Ablation ◽  
Short Pulse ◽  
Single Walled Carbon Nanotube ◽  
Short Pulse Laser ◽  
Ultra Short Pulse ◽  
Carbon Nanotube Networks ◽  
Ultra Short Pulse Laser

scholarly journals Acoustic emission-based characterization of focal position during ultra-short pulse laser ablation

Procedia CIRP ◽  
2019 ◽  
Vol 81 ◽  
pp. 270-275 ◽  
Author(s):  
Andreas Kacaras ◽  
Matthias Bächle ◽  
Markus Schwabe ◽  
Frederik Zanger ◽  
Fernando Puente León ◽  
...  
Keyword(s):  
Acoustic Emission ◽  
Laser Ablation ◽  
Pulse Laser ◽  
Pulse Laser Ablation ◽  
Short Pulse ◽  
Short Pulse Laser ◽  
Focal Position ◽  
Ultra Short Pulse ◽  
Ultra Short Pulse Laser

Ultra-short pulse laser ablation of Al70Cu20Fe10 alloy: Nanoparticles generation and thin films deposition

2009 ◽  
Vol 517 (6) ◽  
pp. 1880-1886 ◽  
Author(s):  
R. Teghil ◽  
L. D'Alessio ◽  
A. De Bonis ◽  
D. Ferro ◽  
A. Galasso ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Pulse Laser ◽  
Pulse Laser Ablation ◽  
Short Pulse ◽  
Alloy Nanoparticles ◽  
Short Pulse Laser ◽  
Ultra Short Pulse ◽  
Ultra Short Pulse Laser
Sign in / Sign up

Export Citation Format

Share Document