Flying Probe measurement accuracy improvement by external LCR integration

Measurement ◽  
2022 ◽  
pp. 110703
Author(s):  
Raul Ionel ◽  
Liliana Mâţiu-Iovan
IEEE Access ◽  
2020 ◽  
Vol 8 ◽  
pp. 99655-99664
Author(s):  
Qinghua Wang ◽  
Feng Xu ◽  
Bo Yang ◽  
Lijie Feng ◽  
Dedong Huang ◽  
...  

Sensors ◽  
2016 ◽  
Vol 16 (1) ◽  
pp. 84 ◽  
Author(s):  
Marta Torralba ◽  
José Yagüe-Fabra ◽  
José Albajez ◽  
Juan Aguilar

Measurement ◽  
2016 ◽  
Vol 94 ◽  
pp. 717-725 ◽  
Author(s):  
Gang Zhao ◽  
Chengyang Zhang ◽  
Xishuang Jing ◽  
Zhanlei Sun ◽  
Yuxiang Zhang ◽  
...  

2020 ◽  
Vol 166 ◽  
pp. 05005
Author(s):  
Andrii Tkachuk ◽  
Olena Bezvesilna ◽  
Oleksandr Dobrzhanskyi ◽  
Anna Ostapchuk ◽  
Mykola Horodyskyi

The structure and principle of information and measurement system performance of weapon stabilization are described. Established, that the classical stabilization system consists of a stabilizing platform of the sensitive element (or block of sensitive elements), defining the absolute angle of platform α rotation, the sensing element output signal amplifier, engines and tachometers. The classical system of indirect stabilization is reviewed, its mathematical description is made. A new precision sensitive element for the information and measurement system of weapon stabilization is suggested, the principle of its performance is introduced. Constructive methods of measurement accuracy improvement in the new sensitive element are analyzed. A simulation of the new sensitive element performance influenced by the external disturbances is carried out.


2002 ◽  
Vol 10 (15) ◽  
pp. 685 ◽  
Author(s):  
Wencai Jing ◽  
Yimo Zhang ◽  
Ge Zhou ◽  
Feng Tang ◽  
Haifeng Li

2013 ◽  
Vol 303-306 ◽  
pp. 399-402 ◽  
Author(s):  
Xin Fu Liu ◽  
Zhi Hui Zhu ◽  
Ru Qing Zhang ◽  
Run Li Zhang

This article briefly elaborated the basic concepts of the probe vacillated at testing a large silicon wafer with square four point probe equipment. The importance of the micro-area’s sheet resistance is discussed and the basic principles of four point probe measurement technology are analyzed. Some factors that affect the measurement accuracy are studied, and interference can be avoided while measuring and analyzing the impact on square four point probe measurement by probe vacillate. The calculation formula of the square micro-area probe measurement is deduced when probes vacillated discretionarily. At last, an experiment was made with a small wafer sample and accurate resistivity was gotten.


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