Three-dimensional simulation of resist pattern deformation by surface tension at the drying process
2005 ◽
Vol 78-79
◽
pp. 515-520
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2014 ◽
Vol 2014.27
(0)
◽
pp. 165-166
2008 ◽
Vol 128
(2)
◽
pp. 459-466
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Keyword(s):
2015 ◽
Vol 9
(3)
◽
pp. 266
2009 ◽
Vol 19
(1)
◽
pp. 75-90
◽
1996 ◽
Vol 51
(2)
◽
pp. 245-260
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