Three-dimensional simulation of resist pattern deformation by surface tension at the drying process

2005 ◽  
Vol 78-79 ◽  
pp. 515-520 ◽  
Author(s):  
M. Kotera ◽  
N. Ochiai
Author(s):  
Auro Ashish Saha ◽  
Sushanta K. Mitra

A three-dimensional numerical simulation of flow in patterned microchannel with alternate layers of hydrophilic and hydrophobic surfaces at the bottom wall is studied here. Surface characteristics of the microchannel are accounted by specifying the contact angle and the surface tension of the fluid. Meniscus profiles with varying amplitude and shapes are obtained under the different specified surface conditions. Flow instability increases as the fluid at the bottom wall traverses alternately from hydrophilic region to hydrophobic region. To understand the surface tension effect of the side walls, a two-dimensional numerical study has also been carried out for the microchannel and the results are compared with three-dimensional simulation. The surface tension effect of the side walls enhances the capillary effect for three-dimensional case.


2014 ◽  
Vol 2014.27 (0) ◽  
pp. 165-166
Author(s):  
Yousuke TOMINAGA ◽  
Seiya HAGIHARA ◽  
Sinya TAKETOMI ◽  
Yuuiti TADANA

2001 ◽  
Author(s):  
Dongmin Wu ◽  
Nicholas Fang ◽  
Cheng Sun ◽  
Xiang Zhang

Abstract Micro-stereolithography (μSL) is an advanced technology that enables fabrication of highly complex three-dimensional polymer microstructures out of UV curable resin. However, releasing of polymerized structures from un-polymerized resin is found to influence substantially the fabrication reliability of μSL, as the surface tension tends to push the fine structures together and cause collapse or adhesion. A theoretical model is developed to analyze the deflection and adhesion between thin polymer beams under capillary force. The detachment length of the test structures and solid surface tension of a typical μSL polymer (HDDA) are obtained experimentally. In this paper, we applied sublimation process to overcome the adhesion problem With the new drying process, no adhesion phenomenon was observed.


2008 ◽  
Vol 128 (2) ◽  
pp. 459-466 ◽  
Author(s):  
Yoshitaka Inui ◽  
Tadashi Tanaka ◽  
Tomoyoshi Kanno

2009 ◽  
Vol 19 (1) ◽  
pp. 75-90 ◽  
Author(s):  
Hong-Bing Xiong ◽  
Jian-Zhong Lin ◽  
Ze-Fei Zhu

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