Design, fabrication and characterization of high temperature thin film heat flux sensors

2019 ◽  
Vol 217 ◽  
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Jianze Huang ◽  
Juan Li ◽  
Shenyong Yang ◽  
Guifu Ding ◽  
...  
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Heat Flux ◽  
High Temperature ◽  
Heat Flux Sensors ◽  
Fabrication And Characterization

Design, fabrication and characterization of thin film resistances for heat flux sensing application

2016 ◽  
Vol 245 ◽  
pp. 26-39 ◽  
Author(s):  
Aymen Zribi ◽  
Magali Barthès ◽  
Sylvie Bégot ◽  
François Lanzetta ◽  
Jean Yves Rauch ◽  
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Keyword(s):  
Thin Film ◽  
Heat Flux ◽  
Sensing Application ◽  
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Fabrication and characterization of high-temperature microreactors with thin film heater and sensor patterns in silicon nitride tubes

Lab on a Chip ◽  
2005 ◽  
Vol 5 (3) ◽  
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Author(s):  
R. M. Tiggelaar ◽  
J. W. Berenschot ◽  
J. H. de Boer ◽  
R. G. P. Sanders ◽  
J. G. E. Gardeniers ◽  
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Keyword(s):  
Thin Film ◽  
High Temperature ◽  
Silicon Nitride ◽  
Fabrication And Characterization
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