Direct Monte-Carlo simulation of dry e-beam etching of resist

2020 ◽  
Vol 227 ◽  
pp. 111313 ◽  
Author(s):  
F. Sidorov ◽  
A. Rogozhin ◽  
M. Bruk ◽  
E. Zhikharev
1997 ◽  
Vol 119 (3) ◽  
pp. 368-374 ◽  
Author(s):  
S. Charles Liu ◽  
S. Jack Hu

Traditional variation analysis methods, such as Root Sum Square method and Monte Carlo simulation, are not applicable to sheet metal assemblies because of possible part deformation during the assembly process. This paper proposes the use of finite element methods (FEM) in developing mechanistic variation simulation models for deformable sheet metal parts with complex two or three dimensional free form surfaces. Mechanistic variation simulation provides improved analysis by combining engineering structure models and statistical analysis in predicting the assembly variation. Direct Monte Carlo simulation in FEM is very time consuming, because hundreds or thousands of FEM runs are required to obtain a realistic assembly distribution. An alternative method, based on the Method of Influence Coefficients, is developed to improve the computational efficiency, producing improvements by several orders of magnitude. Simulations from both methods yield almost identical results. An example illustrates the developed methods used for evaluating sheet metal assembly variation. The new approaches provide an improved understanding of sheet metal assembly processes.


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