Nitrogen-doped Czochralski silicon treated in rapid thermal process

2006 ◽  
Vol 134 (2-3) ◽  
pp. 193-201 ◽  
Author(s):  
Deren Yang ◽  
Ming Li ◽  
Can Cui ◽  
Xiangyang Ma ◽  
Duanlin Que
Keyword(s):  
Thermal Process ◽  
Rapid Thermal Process ◽  
Nitrogen Doped ◽  
Czochralski Silicon

Effect of nitrogen doping on denuded zone formed by rapid thermal process in Czochralski silicon wafer

2006 ◽  
Vol 376-377 ◽  
pp. 216-219 ◽  
Author(s):  
Can Cui ◽  
Deren Yang ◽  
Xiangyang Ma ◽  
Ruixin Fan ◽  
Liben Li ◽  
...  
Keyword(s):  
Silicon Wafer ◽  
Thermal Process ◽  
Nitrogen Doping ◽  
Rapid Thermal Process ◽  
Czochralski Silicon

Investigation of rapid thermal process-induced defects in ion-implanted Czochralski silicon

1991 ◽  
Author(s):  
Charles B. Yarling ◽  
Sookap Hahn ◽  
David T. Hodul ◽  
Hisaaki Suga ◽  
Walter L. Smith
Keyword(s):  
Thermal Process ◽  
Rapid Thermal Process ◽  
Czochralski Silicon ◽  
Induced Defects ◽  
Ion Implanted

Oxygen Precipitation of Nitrogen-Doped Czochralski Silicon Subjected to Multi-Step Thermal Process

2019 ◽  
Vol 3 (4) ◽  
pp. 89-96
Author(s):  
Deren Yang ◽  
Qiang Ma ◽  
Xiangyang Ma ◽  
Duanlin Duan
Keyword(s):  
Thermal Process ◽  
Nitrogen Doped ◽  
Czochralski Silicon ◽  
Oxygen Precipitation

Effect of Rapid Thermal Process on Oxygen Precipitation in Heavily Boron-Doped Czochralski Silicon Wafer

2003 ◽  
Vol 42 (Part 1, No. 12) ◽  
pp. 7290-7291 ◽  
Author(s):  
Chunlong Li ◽  
Xiangyang Ma ◽  
Jin Xu ◽  
Xuegong Yu ◽  
Deren Yang ◽  
...  
Keyword(s):  
Silicon Wafer ◽  
Thermal Process ◽  
Rapid Thermal Process ◽  
Czochralski Silicon ◽  
Oxygen Precipitation ◽  
Boron Doped

Influence of rapid thermal process on intrinsic gettering in fast neutron irradiated Czochralski silicon

2006 ◽  
Vol 16 ◽  
pp. s109-s112
Author(s):  
Gui-feng CHEN ◽  
Yang-xian LI ◽  
Xing-hua LI ◽  
Li-li CAI ◽  
Qiao-yun MA ◽  
...  
Keyword(s):  
Fast Neutron ◽  
Thermal Process ◽  
Rapid Thermal Process ◽  
Czochralski Silicon

Nano-scale analysis of precipitates in nitrogen-doped Czochralski silicon

2003 ◽  
Vol 66 (1-4) ◽  
pp. 305-313 ◽  
Author(s):  
G.A. Rozgonyi ◽  
A. Karoui ◽  
A. Kvit ◽  
G. Duscher
Keyword(s):  
Scale Analysis ◽  
Nitrogen Doped ◽  
Czochralski Silicon ◽  
Nano Scale
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