Irradiation-induced damage in porous low-k materials during low-energy heavy-ion elastic recoil detection analysis
2006 ◽
Vol 249
(1-2)
◽
pp. 189-192
◽
Keyword(s):
1998 ◽
Vol 136-138
◽
pp. 594-602
◽
Keyword(s):
2006 ◽
Vol 161
(4)
◽
pp. 247-255
◽
Keyword(s):
1998 ◽
Vol 136-138
◽
pp. 707-712
◽