secondary ion mass spectrometry
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Micromachines ◽  
2022 ◽  
Vol 13 (1) ◽  
pp. 108
Author(s):  
Iksoo Park ◽  
Donghun Lee ◽  
Bo Jin ◽  
Jungsik Kim ◽  
Jeong-Soo Lee

Effects of carbon implantation (C-imp) on the contact characteristics of Ti/Ge contact were investigated. The C-imp into Ti/Ge system was developed to reduce severe Fermi-level pinning (FLP) and to improve the thermal stability of Ti/Ge contact. The current density (J)-voltage (V) characteristics showed that the rectifying behavior of Ti/Ge contact into an Ohmic-like behavior with C-imp. The lowering of Schottky barrier height (SBH) indicated that the C-imp could mitigate FLP. In addition, it allows a lower specific contact resistivity (ρc) at the rapid thermal annealing (RTA) temperatures in a range of 450–600 °C. A secondary ion mass spectrometry (SIMS) showed that C-imp facilitates the dopant segregation at the interface. In addition, transmission electron microscopy (TEM) and electron energy loss spectroscopy (EELS) mapping showed that after RTA at 600 °C, C-imp enhances the diffusion of Ge atoms into Ti layer at the interface of Ti/Ge. Thus, carbon implantation into Ge substrate can effectively reduce FLP and improve contact characteristics.


Author(s):  
Zebadiah Teichert ◽  
Maitrayee Bose ◽  
Peter Williams ◽  
Richard L. Hervig ◽  
Lynda B. Williams

Author(s):  
А.Н. Моисеев ◽  
В.С. Евстигнеев ◽  
А.В. Чилясов ◽  
М.В. Костюнин

The dependence of iodine incorporation in CdTe layers on the deposition conditions during metalorganic vapor phase epitaxy is investigated. The growth of the layers was carried out from dimethylcadmium and diethyltellurium in the hydrogen flow in a vertical reactor with a hot wall condition at a total pressure of 20 kPa. The total iodine concentration was determined by secondary ion mass spectrometry, the electrically active concentration was determined from the Hall effect measurement. The iodine incorporation depends on the crystallographic orientation of the substrate (were studied (100), (310), (111)A, (111)B, (211)A and (211)B), the concentration of the doping precursor (flux range 5·10–8–3·10–6 mol/min), the mole ratio of organometallic compounds (DMCd/DETe=0.25–4), growth temperature (335–390°C) and the walls of the reactor above the pedestal (hot wall zone 290–320°C). The total iodine concentration reached 5·1018 cm–3 and the activation efficiency was ~4 %. After thermal annealing in cadmium vapor at 500°C the activation efficiency was ~100 %.


2022 ◽  
Vol 572 ◽  
pp. 151467
Author(s):  
Sang Ju Lee ◽  
Aram Hong ◽  
Jinwan Cho ◽  
Chang Min Choi ◽  
Ji Young Baek ◽  
...  

2021 ◽  
Vol 23 (1) ◽  
pp. 160
Author(s):  
Stefania Rabasco ◽  
Tho D. K. Nguyen ◽  
Chaoyi Gu ◽  
Michael E. Kurczy ◽  
Nhu T. N. Phan ◽  
...  

The absolute concentration and the compartmentalization of analytes in cells and organelles are crucial parameters in the development of drugs and drug delivery systems, as well as in the fundamental understanding of many cellular processes. Nanoscale secondary ion mass spectrometry (NanoSIMS) imaging is a powerful technique which allows subcellular localization of chemical species with high spatial and mass resolution, and high sensitivity. In this study, we combined NanoSIMS imaging with spatial oversampling with transmission electron microscopy (TEM) imaging to discern the compartments (dense core and halo) of large dense core vesicles in a model cell line used to study exocytosis, and to localize 13C dopamine enrichment following 4–6 h of 150 μM 13C L-3,4-dihydroxyphenylalanine (L-DOPA) incubation. In addition, the absolute concentrations of 13C dopamine in distinct vesicle domains as well as in entire single vesicles were quantified and validated by comparison to electrochemical data. We found concentrations of 87.5 mM, 16.0 mM and 39.5 mM for the dense core, halo and the whole vesicle, respectively. This approach adds to the potential of using combined TEM and NanoSIMS imaging to perform absolute quantification and directly measure the individual contents of nanometer-scale organelles.


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