Suppression of carbon buildup and lifetime improvement by heating carbon stripper foils
2011 ◽
Vol 269
(3)
◽
pp. 223-228
◽
2008 ◽
Vol 590
(1-3)
◽
pp. 32-36
◽
2013 ◽
Vol 417
◽
pp. 012071
◽
1983 ◽
Vol 206
(1-2)
◽
pp. 331-333
◽
1995 ◽
Vol 103
(2)
◽
pp. 249-251
◽
1982 ◽
Vol 200
(1)
◽
pp. 5-11
◽
Lifetime dependence of nitrided carbon stripper foils on sputter angle during N+ ion beam sputtering
2015 ◽
Vol 358
◽
pp. 263-270