scholarly journals Dynamic and Static Analysis of the Key Vertical Parts of a Large Scale Ultra-precision Optical Aspherical Machine Tool

Procedia CIRP ◽  
2015 ◽  
Vol 27 ◽  
pp. 247-253
Author(s):  
Lin Sun ◽  
Shuming Yang ◽  
Pu Zhao ◽  
Pengfei Wu ◽  
Xingyuan Long ◽  
...  
Author(s):  
Guo-Da Chen ◽  
Ya-Zhou Sun ◽  
Fei-Hu Zhang ◽  
Li-Hua Lu ◽  
Wan-Qun Chen ◽  
...  

Author(s):  
Hao Duan ◽  
Shinya Morita ◽  
Takuya Hosobata ◽  
Masahiro Takeda ◽  
Yutaka Yamagata

Abstract Aspherical or free-form optical surface machining using an ultra-precision machine tool is a common and effective method in precision optics manufacturing. However, this method sometimes causes waviness due to the machine’s motion in mid-spatial frequency (MSF) form deviations. This waviness lowers the quality of the optical surface. To address this problem, we use the waviness of the axial displacement of the ultra-precision machine tool. The waviness is obtained by a non-contact on-machine metrology (OMM) system that measures an optical flat as a correction reference curve, which is used to correct the surface of the workpiece to reduce the effect of waviness in advance. The OMM system consists of a displacement probe and a machine tool axis position capture device. The probe system uses a confocal chromatic probe on an ultra-precision machine tool to evaluate the form deviation of the workpiece with 1 nm resolution. The axis position capture system uses a signal branch circuit of linear scale on each axis from the ultra-precision machine tool. The OMM system is tested in terms of accuracy and repeatability. In comparison to the results of the shaper cutting of an oxygen-free copper (OFC) workpiece with feed-forward correction, we were able to reduce the profile error from 125.3 nm to 42.1 nm in p-v (peak to valley) and eventually also reduced the waviness.


2006 ◽  
Vol 129 (3) ◽  
pp. 636-643 ◽  
Author(s):  
Bethany A. Woody ◽  
K. Scott Smith ◽  
Robert J. Hocken ◽  
Jimmie A. Miller

High-speed machining (HSM) has had a large impact on the design and fabrication of aerospace parts and HSM techniques have been used to improve the quality of conventionally machined parts as well. Initially, the trend toward HSM of monolithic parts was focused on small parts, where existing machine tools have sufficient precision to machine the required features. But, as the technology continues to progress, the scale of monolithic parts has continued to grow. However, the growth of such parts has become limited by the inability of existing machines to achieve the tolerances required for assembly due to the long-range accuracy and the thermal environment of most machine tools. Increasing part size without decreasing the tolerances using existing technology requires very large and very accurate machines in a tightly controlled thermal environment. As a result, new techniques are needed to precisely and accurately manufacture large scale monolithic components. Previous work has established the fiducial calibration system (FCS), a technique, which, for the first time provides a method that allows for the accuracy of a coordinate measuring machine (CMM) to be transferred to the shop floor. This paper addresses the range of applicability of the FCS, and provides a method to answer two fundamental questions. First, given a set of machines and fiducials, how much improvement in precision of the finished part can be expected? And second, given a desired precision of the finished part, what machines and fiducials are required? The achievable improvement in precision using the FCS depends on a number of factors including, but not limited to: the type of fiducial, the probing system on the machine and CMM, the time required to make a measurement, and the frequency of measurement. In this paper, the sensitivity of the method to such items is evaluated through an uncertainty analysis, and examples are given indicating how this analysis can be used in a variety of cases.


Author(s):  
Yohichi Nakao ◽  
Masanori Ishikawa

Water drive spindle has been developed as a spindle for ultra-precision machine tool. Performances of the water drive spindle were evaluated by experiments and simulations. In addition, the spindle was applied to diamond cutting experiments, then, successfully the fine mirrored surfaces were finished. However, rotational direction of the water drive spindle is limited, which is due to the structure of the spindle. Thus, development of water drive spindle that is capable of rotating spindle rotor for both rotational directions is current our objective. In advance of developing the water drive spindle, fluid drive spindle that is similar structure with the water drive spindle, is designed and tested in the present paper. Furthermore, control performances of the fluid drive spindle are studied through simulations. Linearized mathematical models of the fluid drive spindle and servo valve are introduced, then, they are used for the simulations. It is verified that the developed fluid drive spindle is able to rotate for both rotational directions and the spindle speed can be controlled by designed feedback controller.


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