scholarly journals Development of a 6×6 Element Air-Coupled Multiple Moving Membrane Capacitive Micromachined Ultrasonic Transducer Array, M3-CMUT, for High Resolution Detection Applications

2014 ◽  
Vol 87 ◽  
pp. 50-53
Author(s):  
T.A. Emadi ◽  
D.A. Buchanan
Keyword(s):  
High Resolution ◽  
Ultrasonic Transducer ◽  
Transducer Array ◽  
Capacitive Micromachined Ultrasonic Transducer

Design and Fabrication of a High-Power Air-Coupled Capacitive Micromachined Ultrasonic Transducer Array With Concentric Annular Cells

2017 ◽  
Vol 64 (11) ◽  
pp. 4636-4643 ◽  
Author(s):  
Shuai Na ◽  
Zhou Zheng ◽  
Albert I-Hsiang Chen ◽  
Lawrence L. P. Wong ◽  
Zhenhao Li ◽  
...  
Keyword(s):  
High Power ◽  
Ultrasonic Transducer ◽  
Transducer Array ◽  
Capacitive Micromachined Ultrasonic Transducer

Fabrication of a Curved Row–Column Addressed Capacitive Micromachined Ultrasonic Transducer Array

2016 ◽  
Vol 25 (4) ◽  
pp. 675-682 ◽  
Author(s):  
Albert I-Hsiang Chen ◽  
Lawrence L. P. Wong ◽  
Shuai Na ◽  
Zhenhao Li ◽  
Mirek Macecek ◽  
...  
Keyword(s):  
Ultrasonic Transducer ◽  
Transducer Array ◽  
Capacitive Micromachined Ultrasonic Transducer
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