Modeling of MEMS based capacitive micromachined ultrasonic transducer array element at static voltage
2015 ◽
Vol 12
(10)
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pp. 3692-3696
1999 ◽
Vol 46
(6)
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pp. 1337-1340
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2017 ◽
Vol 64
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pp. 4636-4643
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2009 ◽
Vol 126
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pp. 2829
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Vol 25
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pp. 675-682
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2013 ◽
Vol 39
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pp. 1500-1512
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2013 ◽
Vol 60
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pp. 3562-3569
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