Study, design, microfabrication and characterization of a new CMOS compatible multi-terminal pressure sensor with enhanced sensitivity

2011 ◽  
Vol 165 (1) ◽  
pp. 43-53 ◽  
Author(s):  
Guilherme de Oliveira Coraucci ◽  
Fabiano Fruett
Keyword(s):  
Study Design ◽  
Pressure Sensor ◽  
Enhanced Sensitivity ◽  
Cmos Compatible

Pressure Sensor Monolithically Integrating MEMS and CMOS-LSI with CMOS Compatible “Back-end-of-line MEMS processes”

2010 ◽  
Vol 130 (5) ◽  
pp. 170-175
Author(s):  
Tsukasa Fujimori ◽  
Hideaki Takano ◽  
Yuko Hanaoka ◽  
Yasushi Goto
Keyword(s):  
Pressure Sensor ◽  
Cmos Compatible

Characterization of a Soft Pressure Sensor on the Basis of Ionic Liquid Concentration and Thickness of the Piezoresistive Layer

2019 ◽  
Vol 19 (15) ◽  
pp. 6076-6084 ◽  
Author(s):  
Md. Omar Faruk Emon ◽  
Jeongwoo Lee ◽  
U Hyeok Choi ◽  
Da-Hye Kim ◽  
Kyung-Chang Lee ◽  
...  
Keyword(s):  
Ionic Liquid ◽  
Pressure Sensor ◽  
Liquid Concentration ◽  
Ionic Liquid Concentration

scholarly journals Fibre grating pressure sensor with enhanced sensitivity using a glass-bubble housing

1996 ◽  
Vol 32 (2) ◽  
pp. 128 ◽  
Author(s):  
M.G. Xu ◽  
H. Geiger ◽  
J.P. Dakin
Keyword(s):  
Pressure Sensor ◽  
Enhanced Sensitivity ◽  
Glass Bubble

Test structures for CMOS-compatible silicon pressure sensor reliability characterization

2000 ◽  
Author(s):  
Enric Montane ◽  
Sebastian A. Bota ◽  
Santiago Marco ◽  
M. Carmona ◽  
Josep Samitier
Keyword(s):  
Pressure Sensor ◽  
Cmos Compatible

scholarly journals The characterization of a pressure sensor constructed from a knitted spacer structure

2019 ◽  
Vol 5 (1) ◽  
pp. 22 ◽  
Author(s):  
Theodore Hughes-Riley ◽  
Carlos Oliveira ◽  
RobertH Morris ◽  
Tilak Dias
Keyword(s):  
Pressure Sensor
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