Design, fabrication, and characterization of a high-performance CMOS-compatible thermopile infrared detector with self-test function
2018 ◽
Vol 28
(12)
◽
pp. 125017
◽
Keyword(s):
1999 ◽
Vol 43
(3)
◽
pp. 659-663
◽
2020 ◽
Vol 397
◽
pp. 125105
◽
1994 ◽
Vol 41
(8)
◽
pp. 1319-1326
◽
2016 ◽
Vol 1443
◽
pp. 111-117
◽
Keyword(s):