19-picometer mechanical step displacement measurement using heterodyne interferometer with phase-locked loop and piezoelectric driving flexure-stage

2020 ◽  
Vol 304 ◽  
pp. 111880 ◽  
Author(s):  
Thanh Dong Nguyen ◽  
Quang Anh Duong ◽  
Masato Higuchi ◽  
Thanh Tung Vu ◽  
Dong Wei ◽  
...  
Keyword(s):  
Phase Locked Loop ◽  
Displacement Measurement ◽  
Heterodyne Interferometer

A Two-Color Heterodyne Interferometer Based on Diffraction Grating for Displacement Measurement

2005 ◽  
Vol 295-296 ◽  
pp. 189-194 ◽  
Author(s):  
G.H. Wu ◽  
Z.J. Cai ◽  
Li Jiang Zeng
Keyword(s):  
Diffraction Grating ◽  
High Accuracy ◽  
Displacement Measurement ◽  
Optical Diffraction ◽  
Fringe Order ◽  
Heterodyne Interferometer

A two-color heterodyne interferometer based on the movement of the optical diffraction grating is proposed. The method allows us to measure the phase of synthetic wavelength f s directly and with high accuracy to extend the range of unambiguity for interferometric measurements by using two close wavelengths. Our experiment results show that the uncertainty in displacement measurement caused by the uncertainty in f s is 0.20 µm, smaller than the half of a single wavelength we used. The fringe order of a single wavelength can be determined without ambiguity. The uncertainty in displacement measurement can be improved further by using a single wavelength.

Sub-Nanometer Resolution Displacement Measurement by Heterodyne Interferometer with a Holographic Displacement Sensor

2012 ◽  
Vol 10 (3) ◽  
pp. 789-793 ◽  
Author(s):  
Cheng-Chih Hsu ◽  
Kuan-Chung Huang ◽  
Shou-Heng Liang ◽  
Meng-Chun Kao
Keyword(s):  
Displacement Measurement ◽  
Displacement Sensor ◽  
Nanometer Resolution ◽  
Heterodyne Interferometer

Heterodyne interferometer laser source with a pair of two phase locked loop coupled He–Ne lasers by 632.8 nm

2012 ◽  
Vol 23 (7) ◽  
pp. 074006 ◽  
Author(s):  
C Sternkopf ◽  
C Diethold ◽  
U Gerhardt ◽  
J Wurmus ◽  
E Manske
Keyword(s):  
Phase Locked Loop ◽  
Laser Source ◽  
Two Phase ◽  
Heterodyne Interferometer

scholarly journals Laser heterodyne interferometer with rotational error compensation for precision displacement measurement

2018 ◽  
Vol 26 (1) ◽  
pp. 90 ◽  
Author(s):  
Enzheng Zhang ◽  
Benyong Chen ◽  
Hao Zheng ◽  
Liping Yan ◽  
Xueying Teng
Keyword(s):  
Error Compensation ◽  
Displacement Measurement ◽  
Heterodyne Interferometer ◽  
Rotational Error ◽  
Laser Heterodyne

Integrated-optic heterodyne interferometer for displacement measurement

1991 ◽  
Vol 9 (5) ◽  
pp. 683-687 ◽  
Author(s):  
H. Toda ◽  
M. Haruna ◽  
H. Nishihara
Keyword(s):  
Displacement Measurement ◽  
Heterodyne Interferometer

scholarly journals Picometer mechanical displacement measurement using heterodyne interferometer with phase-locked loop

2020 ◽  
Vol 238 ◽  
pp. 06003
Author(s):  
Masato Aketagawa ◽  
Thanh Dong Nguyen
Keyword(s):  
High Voltage ◽  
Piezoelectric Actuator ◽  
Field Programmable Gate Array ◽  
Phase Measurement ◽  
Phase Locked Loop ◽  
Mechanical Motion ◽  
Hene Laser ◽  
Mechanical Displacement ◽  
Heterodyne Interferometer ◽  
Field Programmable

In this paper, we show picometer-order mechnical displacmment measurements using a heterodyne interferometer with a phase-locked loop (PLL). A heterodyne light source for the interferometer is implemented with a frequency stabilized HeNe laser and two acousto-optic modulators. A real time phase measurement is performed by the PLL, whose software is programmed in a field-programmable gate array (FPGA). A stiff parallel spring stage combined with a high-voltage piezoelectric actuator is used to generate picometer-order mechanical motion. With the above implementations, mechanical displacement of 10 picometer or less can be measured.

Sign in / Sign up

Export Citation Format

Share Document