Moderate temperature and high-speed synthesis of α-Al2O3 films by laser chemical vapor deposition using Nd:YAG laser

2010 ◽  
Vol 204 (14) ◽  
pp. 2302-2306 ◽  
Author(s):  
Hokuto Kadokura ◽  
Akihiko Ito ◽  
Teiichi Kimura ◽  
Takashi Goto
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Nd:Yag Laser ◽  
High Speed ◽  
Chemical Vapor ◽  
Moderate Temperature ◽  
Laser Chemical Vapor Deposition ◽  
Α Al2o3 ◽  
Al2o3 Films

High‐speed laser chemical vapor deposition of copper: A search for optimum conditions

1989 ◽  
Vol 65 (6) ◽  
pp. 2470-2474 ◽  
Author(s):  
B. Markwalder ◽  
M. Widmer ◽  
D. Braichotte ◽  
H. van den Bergh
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
High Speed ◽  
Chemical Vapor ◽  
Optimum Conditions ◽  
Laser Chemical Vapor Deposition

High-Speed Preparation of - and -Oriented β-SiC Films by Laser Chemical Vapor Deposition

2013 ◽  
Vol 97 (3) ◽  
pp. 952-958 ◽  
Author(s):  
Song Zhang ◽  
Qingfang Xu ◽  
Rong Tu ◽  
Takashi Goto ◽  
Lianmeng Zhang
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
High Speed ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition ◽  
Sic Films
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