Preparation of a nanopatterned surface of bonded silicon wafers using electrochemical thinning and chemical etching: A scanning tunnel microscopy investigation

Microscopy Investigation ◽

Nanopatterned Surface ◽

Scanning tunnel microscopy of coatings with titan carbonitride nanoparticles and their properties

10.1063/1.5013795 ◽

2017 ◽

Author(s):

Pavel V. Kuznetsov ◽

Nina K. Galchenko ◽

Tanzilya V. Rakhmatulina ◽

Victor P. Samartsev ◽

Ksenia A. Kolesnikova ◽

...

Keyword(s):

Annealing of Glass-Deposited Silver Island Films Lead to Creation of Regular Sers-Active Surfaces. Comparative Scanning Tunnel Microscopy and Sers Study

Spectroscopy of Biological Molecules ◽

10.1007/978-94-011-0371-8_11 ◽

1995 ◽

pp. 27-28

Author(s):

S. Maskevich ◽

I. Sveklo ◽

A. Feofanov ◽

A. Ianoul ◽

V. Oleinikov ◽

...

Keyword(s):

Silver Island Films ◽

Active Surfaces ◽

Silver Island ◽

Island Films ◽

Fabrication of Microholes in Silicon Wafers by Using Wet-Chemical Etching

New Physics Sae Mulli ◽

10.3938/npsm.68.834 ◽

2018 ◽

Vol 68 (8) ◽

pp. 834-838

Author(s):

Ha Young LEE ◽

Ji-Yeon NOH ◽

Min Sub KWAK ◽

Kyung-Won LIM ◽

Hyung Soo AHN ◽

...

Keyword(s):

Chemical Etching ◽

Silicon Wafers ◽

Wet Chemical ◽

Wet Chemical Etching

2020 IEEE 40th International Conference on Electronics and Nanotechnology (ELNANO) ◽

Research of Surface Relief Morphology of Nanosized Gold Films by the Method of Scanning Tunnel Microscopy

10.1109/elnano50318.2020.9088822 ◽

2020 ◽

Author(s):

Daria Havryliuk ◽

Yaroslav Zhuk ◽

Mykola Melnichenko

Keyword(s):

Surface Relief ◽

Gold Films ◽

Ultra-Thin Silicon Wafers Fabrication and Inverted Pyramid Texturing Based on Cu-Catalyzed Chemical Etching

Silicon ◽

10.1007/s12633-020-00429-x ◽

2020 ◽

Author(s):

Altyeb Ali Abaker Omer ◽

Zudong He ◽

Shihao Hong ◽

Yuanchih Chang ◽

Jie Yu ◽

...

Keyword(s):

Chemical Etching ◽

Silicon Wafers ◽

Inverted Pyramid ◽

Thin Silicon

Metal-assisted chemical etching for very high aspect ratio grooves inn-type silicon wafers

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/24/12/125026 ◽

2014 ◽

Vol 24 (12) ◽

pp. 125026 ◽

Cited By ~ 9

Author(s):

Katherine Booker ◽

Maureen Brauers ◽

Erin Crisp ◽

Shakir Rahman ◽

Klaus Weber ◽

...

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Chemical Etching ◽

Silicon Wafers ◽

Type Silicon ◽

Metal Assisted Chemical Etching ◽

Very High

Quantitative characterization of ultrafine grained 12GBA steel with scanning tunnel microscopy

10.1063/1.4966420 ◽

2016 ◽

Cited By ~ 1

Author(s):

Pavel Kuznetsov ◽

Tanzilya Rakhmatulina ◽

Victor Panin ◽

Dariya Shumakova

Keyword(s):

Quantitative Characterization ◽

Ultrafine Grained ◽

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

Nanoscale fabrication on a clean TiO2(110)1×2 surface by scanning tunnel microscopy

10.1116/1.589249 ◽

1997 ◽

Vol 15 (1) ◽

pp. 25 ◽

Cited By ~ 7

Author(s):

A. Berkó

Keyword(s):

Nanoscale Fabrication ◽

Numerical and Experimental Investigation of Wet Chemical Etching of Silicon Wafers

ECS Transactions ◽

10.1149/1.2408883 ◽

2019 ◽

Vol 2 (6) ◽

pp. 295-303 ◽

Cited By ~ 4

Author(s):

Kimihisa Kaneko ◽

Akira Tamenori ◽

Norbert Alleborn ◽

Franz Durst

Keyword(s):

Experimental Investigation ◽

Chemical Etching ◽

Silicon Wafers ◽

Wet Chemical ◽

Wet Chemical Etching

TEM Observations of Pyramidal Hillocks Formed on (001) Silicon Wafers during Chemical Etching

Journal of The Electrochemical Society ◽

10.1149/1.2129784 ◽

1980 ◽

Vol 127 (4) ◽

pp. 910-913 ◽

Cited By ~ 5

Author(s):

Fumio Shimura

Keyword(s):

Chemical Etching ◽

Silicon Wafers