Intrinsic stress and preferred orientation in TiN coatings deposited on Al using plasma immersion ion implantation assisted deposition

Thin Solid Films ◽

10.1016/j.tsf.2003.08.065 ◽

2003 ◽

Vol 445 (1) ◽

pp. 48-53 ◽

Author(s):

S. Mukherjee ◽

F. Prokert ◽

E. Richter ◽

W. Möller

Keyword(s):

Ion Implantation ◽

Preferred Orientation ◽

Intrinsic Stress ◽

Tin Coatings ◽

Plasma Immersion Ion Implantation

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Compressive stress, preferred orientation and film composition in Ti-based coatings developed by plasma immersion ion implantation-assisted deposition

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2004.04.019 ◽

2004 ◽

Vol 186 (1-2) ◽

pp. 99-103 ◽

Author(s):

S Mukherjee ◽

F Prokert ◽

E Richter ◽

W Moeller

Keyword(s):

Ion Implantation ◽

Compressive Stress ◽

Preferred Orientation ◽

Film Composition ◽

Plasma Immersion Ion Implantation

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Structural investigation and wear resistance of submicron TiN coatings obtained by a hybrid plasma immersion ion implantation process

Surface and Coatings Technology ◽

10.1016/s0257-8972(01)01216-6 ◽

2001 ◽

Vol 142-144 ◽

pp. 978-983 ◽

Author(s):

R. Günzel ◽

N. Shevshenko ◽

W. Matz ◽

A. Mücklich ◽

J.P. Celis

Keyword(s):

Wear Resistance ◽

Ion Implantation ◽

Structural Investigation ◽

Tin Coatings ◽

Hybrid Plasma ◽

Implantation Process ◽

Plasma Immersion Ion Implantation

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Hydrogen-Permeability of Titanium-Nitride (TiN) Coatings Obtained via the Plasma-Immersion Ion Implantation of Titanium and TiN Vacuum-Arc Deposition on Zr−1%Nb Alloy

Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques ◽

10.1134/s1027451018040080 ◽

2018 ◽

Vol 12 (4) ◽

pp. 705-709

Author(s):

Le Zhang ◽

N. N. Nikitenkov ◽

A. N. Sutygina ◽

E. B. Kashkarov ◽

V. S. Sypchenko ◽

...

Keyword(s):

Ion Implantation ◽

Titanium Nitride ◽

Hydrogen Permeability ◽

Tin Coatings ◽

Vacuum Arc Deposition ◽

Plasma Immersion Ion Implantation ◽

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Compressive stress, preferred orientation and film composition in Ti-based coatings developed by plasma immersion ion implantation-assisted deposition

Surface and Coatings Technology ◽

10.1016/s0257-8972(04)00262-2 ◽

2004 ◽

Author(s):

S MUKHERJEE

Keyword(s):

Ion Implantation ◽

Compressive Stress ◽

Preferred Orientation ◽

Film Composition ◽

Plasma Immersion Ion Implantation

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Minimisation of intrinsic stress in titanium nitride using a cathodic arc with plasma immersion ion implantation

Surface and Coatings Technology ◽

10.1016/s0257-8972(03)00394-3 ◽

2003 ◽

Vol 174-175 ◽

pp. 76-80 ◽

Author(s):

S.H.N. Lim ◽

D.G. McCulloch ◽

M.M.M. Bilek ◽

D.R. McKenzie

Keyword(s):

Ion Implantation ◽

Titanium Nitride ◽

Intrinsic Stress ◽

Plasma Immersion Ion Implantation ◽

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Deposition of TiN coatings on shape memory NiTi alloy by plasma immersion ion implantation and deposition

Thin Solid Films ◽

10.1016/j.tsf.2006.03.041 ◽

2006 ◽

Vol 515 (4) ◽

pp. 1358-1363 ◽

Author(s):

Y. Cheng ◽

Y.F. Zheng

Keyword(s):

Ion Implantation ◽

Shape Memory ◽

Tin Coatings ◽

Plasma Immersion Ion Implantation

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Non-conventional high voltage pulsers for advanced plasma immersion ion implantation

10.1063/1.1374892 ◽

2001 ◽

Author(s):

J. O. Rossi

Keyword(s):

Ion Implantation ◽

High Voltage ◽

Plasma Immersion Ion Implantation

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The effect of plasma immersion ion implantation of Ne+ or Ar+ or Kr+ on the forming voltage of the resistive switching in the structure Ni/Pt/HfO2(10nm)/TaN(5nm)/TiN

Journal of Physics Conference Series ◽

10.1088/1742-6596/1695/1/012009 ◽

2020 ◽

Vol 1695 ◽

pp. 012009

Author(s):

O O Permyakova ◽

A V Miakonkikh ◽

K V Rudenko ◽

A E Rogozhin

Keyword(s):

Ion Implantation ◽

Resistive Switching ◽

Plasma Immersion Ion Implantation

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Correction to “Sub-5 nm Nanodiamonds Fabricated by Plasma Immersion Ion Implantation as Fluorescent Probes”

ACS Applied Nano Materials ◽

10.1021/acsanm.1c01684 ◽

2021 ◽

Author(s):

Sung Ju Han ◽

Min Seo ◽

Min Gyeong Cho ◽

Young-Wan Kwon ◽

Sang-Ho Lim ◽

...

Keyword(s):

Ion Implantation ◽

Fluorescent Probes ◽

Plasma Immersion Ion Implantation

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TiN/ZrO2 multilayers synthesized on GCr15 bearing steel using plasma immersion ion implantation and deposition

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2006.09.120 ◽

2007 ◽

Vol 201 (15) ◽

pp. 6615-6618 ◽

Author(s):

Tao Sun ◽

Langping Wang ◽

Yonghao Yu ◽

Yuhang Wang ◽

Xiaofeng Wang ◽

...

Keyword(s):

Ion Implantation ◽

Bearing Steel ◽

Gcr15 Bearing Steel ◽

Plasma Immersion Ion Implantation

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