Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging

2012 ◽  
Vol 520 (6) ◽  
pp. 2073-2076 ◽  
Author(s):  
Xu Song ◽  
Kong Boon Yeap ◽  
Jing Zhu ◽  
Jonathan Belnoue ◽  
Marco Sebastiani ◽  
...  
Keyword(s):  
Thin Films ◽  
Residual Stress ◽  
Focused Ion Beam ◽  
Stress Measurement ◽  
Ion Beam ◽  
Residual Stress Measurement ◽  
Focused Ion Beam Milling

scholarly journals Residual stress measurement in thin films using the semi-destructive ring-core drilling method using Focused Ion Beam

2011 ◽  
Vol 10 ◽  
pp. 2190-2195 ◽  
Author(s):  
X. Song ◽  
K.B. Yeap ◽  
J. Zhu ◽  
J. Belnoue ◽  
M. Sebastiani ◽  
...  
Keyword(s):  
Thin Films ◽  
Residual Stress ◽  
Focused Ion Beam ◽  
Stress Measurement ◽  
Ion Beam ◽  
Residual Stress Measurement ◽  
Core Drilling ◽  
Drilling Method ◽  
Ring Core

Effect of Geometry and Materials on Residual Stress Measurement in Thin Films by Using the Focused Ion Beam

2004 ◽  
Vol 126 (4) ◽  
pp. 457-464 ◽  
Author(s):  
Ki-Ju Kang ◽  
Severine Darzens ◽  
Gee-Seob Choi
Keyword(s):  
Thin Films ◽  
Residual Stress ◽  
Focused Ion Beam ◽  
Stress Measurement ◽  
Ion Beam ◽  
Carbon Film ◽  
Slot Width ◽  
Residual Stress Measurement ◽  
Two Dimensional ◽  
Slot Length

Recently, a new method for residual stress measurement in thin films by using the focused ion beam (FIB) has been proposed by the authors. It is based on the combined capability of the FIB imaging system and of high-resolution strain mapping software (VIC-2D). A simple equation based on two-dimensional elasticity is used to evaluate the residual stress from the displacements due to introducing a slot. The slot length is assumed to be much larger than the slot width or depth. And the effect of the slot width was neglected. However, it is often hard, depending on film materials, to introduce a narrow and deep slot by FIB. In this work some practical issues regarding the slot geometry are addressed. Through two- and three-dimensional finite element analyses, it is explored how the slot length, width and measurement location affect the displacements which are the basic data for residual stress evaluation. As a result, the validity and limit of the equations based on two-dimensional elasticity are evaluated. Also, the effect of material dissimilarity between film and substrate is explored. Finally, examples for a diamond-like carbon film on glass substrate and an aluminum oxide film thermally grown upon an alloy are presented.

S125 Microscale Residual Stress Measurement in Steel Using Focused Ion Beam Slotting and Digital Image Correlation

2008 ◽  
Vol 23 (2) ◽  
pp. 185-185
Author(s):  
N. Daynes ◽  
G. Horne ◽  
P. J. Heard ◽  
D. Z. L. Hodgson ◽  
A. Shterenlikht
Keyword(s):  
Residual Stress ◽  
Digital Image Correlation ◽  
Digital Image ◽  
Focused Ion Beam ◽  
Stress Measurement ◽  
Ion Beam ◽  
Image Correlation ◽  
Residual Stress Measurement
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