DIC Image on FIB Ring-Core Analysis of Depth Sensing Residual Stress Measurement of Thin Films

Conference Proceedings of the Society for Experimental Mechanics Series - Advancement of Optical Methods & Digital Image Correlation in Experimental Mechanics, Volume 3 ◽

10.1007/978-3-319-97481-1_15 ◽

2018 ◽

pp. 109-111 ◽

Cited By ~ 1

Author(s):

Wen Chieh Pan ◽

Ang-Ting Tsai ◽

Fa-Yen Cheng ◽

Terry Yuan-Fang Chen ◽

Ming-Tzer Lin

Keyword(s):

Thin Films ◽

Residual Stress ◽

Stress Measurement ◽

Residual Stress Measurement ◽

Core Analysis ◽

Depth Sensing ◽

Ring Core

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Residual stress measurement in thin films using the semi-destructive ring-core drilling method using Focused Ion Beam

Procedia Engineering ◽

10.1016/j.proeng.2011.04.362 ◽

2011 ◽

Vol 10 ◽

pp. 2190-2195 ◽

Cited By ~ 15

Author(s):

X. Song ◽

K.B. Yeap ◽

J. Zhu ◽

J. Belnoue ◽

M. Sebastiani ◽

...

Keyword(s):

Thin Films ◽

Residual Stress ◽

Focused Ion Beam ◽

Stress Measurement ◽

Ion Beam ◽

Residual Stress Measurement ◽

Core Drilling ◽

Drilling Method ◽

Ring Core

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Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging

Thin Solid Films ◽

10.1016/j.tsf.2011.10.211 ◽

2012 ◽

Vol 520 (6) ◽

pp. 2073-2076 ◽

Cited By ~ 29

Author(s):

Xu Song ◽

Kong Boon Yeap ◽

Jing Zhu ◽

Jonathan Belnoue ◽

Marco Sebastiani ◽

...

Keyword(s):

Thin Films ◽

Residual Stress ◽

Focused Ion Beam ◽

Stress Measurement ◽

Ion Beam ◽

Residual Stress Measurement ◽

Focused Ion Beam Milling

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Residual Stress Measurement in YBCO Thin Films

Ceramic Transactions Series - Processing of High Temperature Superconductors ◽

10.1002/9781118405932.ch20 ◽

2012 ◽

pp. 219-228

Author(s):

Jae Hong Cheon ◽

J. P. Singh

Keyword(s):

Thin Films ◽

Residual Stress ◽

Stress Measurement ◽

Residual Stress Measurement ◽

Ybco Thin Films

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Experimental Validation of the Calibration Function of the Hole Drilling Method and Ring Core Method for Residual Stress Measurement

Materials Testing ◽

10.3139/120.110541 ◽

2014 ◽

Vol 56 (3) ◽

pp. 184-190 ◽

Cited By ~ 2

Author(s):

David von Mirbach

Keyword(s):

Residual Stress ◽

Experimental Validation ◽

Stress Measurement ◽

Residual Stress Measurement ◽

Hole Drilling ◽

Calibration Function ◽

Hole Drilling Method ◽

Core Method ◽

Drilling Method ◽

Ring Core

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Residual stress measurement in thin films using a slitting method with geometric phase analysis under a dual beam (FIB/SEM) system

Measurement Science and Technology ◽

10.1088/0957-0233/25/9/095003 ◽

2014 ◽

Vol 25 (9) ◽

pp. 095003 ◽

Cited By ~ 9

Author(s):

Ronghua Zhu ◽

Huimin Xie ◽

Xianglu Dai ◽

Jianguo Zhu ◽

Aizi Jin

Keyword(s):

Thin Films ◽

Residual Stress ◽

Phase Analysis ◽

Geometric Phase ◽

Stress Measurement ◽

Residual Stress Measurement ◽

Slitting Method ◽

Dual Beam ◽

Geometric Phase Analysis

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Residual Stress Measurement in Sputtered Copper Thin Films by Synchrotron Radiation and Ordinary X-Rays

Materials Science Forum ◽

10.4028/www.scientific.net/msf.490-491.661 ◽

2005 ◽

Vol 490-491 ◽

pp. 661-666

Author(s):

Mitsuhiko Hataya ◽

Hanabusa Takao ◽

Kazuya Kusaka ◽

Kikuo Tominaga ◽

Tatsuya Matsue ◽

...

Keyword(s):

Thin Films ◽

Residual Stress ◽

Synchrotron Radiation ◽

Stress Measurement ◽

Residual Stress Measurement ◽

X Rays

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X-Ray Residual Stress Measurement of Aluminum Thin Films with (111)Fiber Texture.

Journal of the Society of Materials Science Japan ◽

10.2472/jsms.45.1138 ◽

1996 ◽

Vol 45 (10) ◽

pp. 1138-1144

Author(s):

Keisuke TANAKA ◽

Keisaku ISHIHARA ◽

Kaoru INOUE

Keyword(s):

Thin Films ◽

Residual Stress ◽

Stress Measurement ◽

Fiber Texture ◽

Residual Stress Measurement ◽

X Ray

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Residual Stress Measurement in Sputtered Copper Thin Films by Synchrotron Radiation and Ordinary X-Rays

Materials Science Forum - Residual Stresses VII, ICRS7 ◽

10.4028/0-87849-969-5.661 ◽

2005 ◽

pp. 661-666

Author(s):

Mitsuhiko Hataya ◽

Takao Hanabusa ◽

Kazuya Kusaka ◽

Kikuo Tominaga ◽

Tatsuya Matsue ◽

...

Keyword(s):

Thin Films ◽

Residual Stress ◽

Synchrotron Radiation ◽

Stress Measurement ◽

Residual Stress Measurement ◽

X Rays

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Comparison of residual stress measurement in thin films using surface micromachining method

Thin Solid Films ◽

10.1016/j.tsf.2007.07.086 ◽

2008 ◽

Vol 516 (16) ◽

pp. 5318-5323 ◽

Cited By ~ 10

Author(s):

Q. He ◽

Z.X. Luo ◽

X.Y. Chen

Keyword(s):

Thin Films ◽

Residual Stress ◽

Stress Measurement ◽

Residual Stress Measurement ◽

Surface Micromachining

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Numerical Study of Plasticity Effects on High Residual Stress Measurement Using Ring-Core Technique

Journal of Testing and Evaluation ◽

10.1520/jte20160581 ◽

2018 ◽

Vol 47 (6) ◽

pp. 20160581 ◽

Cited By ~ 1

Author(s):

R. Moharrami ◽

M. Sadri

Keyword(s):

Residual Stress ◽

Stress Measurement ◽

Numerical Study ◽

Residual Stress Measurement ◽

High Residual Stress ◽

Ring Core

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