Atomic layer deposition of tantalum oxide thin films using the precursor tert -butylimido-tris-ethylmethylamido-tantalum and water: Process characteristics and film properties

2017 ◽  
Vol 627 ◽  
pp. 94-105 ◽  
Author(s):  
Thomas Henke ◽  
Martin Knaut ◽  
Marion Geidel ◽  
Felix Winkler ◽  
Matthias Albert ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Tantalum Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Film Properties ◽  
Process Characteristics ◽  
Layer Deposition

Atomic Layer Deposition of Ruthenium Thin Films from (Ethylbenzyl) (1-Ethyl-1,4-cyclohexadienyl) Ru: Process Characteristics, Surface Chemistry, and Film Properties

2017 ◽  
Vol 29 (11) ◽  
pp. 4654-4666 ◽  
Author(s):  
Mihaela Popovici ◽  
Benjamin Groven ◽  
Kristof Marcoen ◽  
Quan Manh Phung ◽  
Shibesh Dutta ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Surface Chemistry ◽  
Atomic Layer ◽  
Film Properties ◽  
Process Characteristics ◽  
Layer Deposition

Comparison of the Atomic Layer Deposition of Tantalum Oxide Thin Films Using Ta(NtBu)(NEt2)3, Ta(NtBu)(NEt2)2Cp, and H2O

2016 ◽  
Vol 9 (1) ◽  
pp. 537-547 ◽  
Author(s):  
Seul Ji Song ◽  
Taehyung Park ◽  
Kyung Jean Yoon ◽  
Jung Ho Yoon ◽  
Dae Eun Kwon ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Tantalum Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Properties of tantalum oxide thin films grown by atomic layer deposition

1995 ◽  
Vol 260 (2) ◽  
pp. 135-142 ◽  
Author(s):  
Kaupo Kukli ◽  
Jaan Aarik ◽  
Aleks Aidla ◽  
Oksana Kohan ◽  
Teet Uustare ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Tantalum Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Atomic Layer Deposition of Tantalum Oxide Thin Films from Iodide Precursor

2001 ◽  
Vol 13 (1) ◽  
pp. 122-128 ◽  
Author(s):  
Kaupo Kukli ◽  
Jaan Aarik ◽  
Aleks Aidla ◽  
Katarina Forsgren ◽  
Jonas Sundqvist ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Tantalum Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Photo-Induced Atomic Layer Deposition of Tantalum Oxide Thin Films from Ta(OC[sub 2]H[sub 5])[sub 5] and O[sub 2]

2004 ◽  
Vol 151 (1) ◽  
pp. C52 ◽  
Author(s):  
Young-Hoon Lee ◽  
Jae-Chan Kwak ◽  
Bong-Suck Gang ◽  
Hie-Chul Kim ◽  
Byung-Ho Choi ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Tantalum Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Preparation of tantalum oxide thin films by photo-assisted atomic layer deposition

2004 ◽  
Vol 230 (1-4) ◽  
pp. 249-253 ◽  
Author(s):  
Jae-Chan Kwak ◽  
Young-Hoon Lee ◽  
Byung-Ho Choi
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Tantalum Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

ChemInform Abstract: Atomic Layer Deposition of Tantalum Oxide Thin Films from Iodide Precursor.

ChemInform ◽  
2001 ◽  
Vol 32 (19) ◽  
pp. no-no
Author(s):  
Kaupo Kukli ◽  
Jaan Aarik ◽  
Aleks Aidla ◽  
Katarina Forsgren ◽  
Jonas Sundqvist ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Tantalum Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

scholarly journals Fabrication of GdxFeyOz films using an atomic layer deposition-type approach

CrystEngComm ◽  
2021 ◽  
Author(s):  
Pengmei Yu ◽  
Sebastian M. J. Beer ◽  
Anjana Devi ◽  
Mariona Coll
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Complex Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Atomic Precision

The growth of complex oxide thin films with atomic precision offers bright prospects to study improved properties and novel functionalities.

Atomic layer deposition of rare earth oxides: erbium oxide thin films from β-diketonate and ozone precursors

2004 ◽  
Vol 374 (1-2) ◽  
pp. 124-128 ◽  
Author(s):  
Jani Päiväsaari ◽  
Matti Putkonen ◽  
Timo Sajavaara ◽  
Lauri Niinistö
Keyword(s):  
Thin Films ◽  
Rare Earth ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Rare Earth Oxides ◽  
Erbium Oxide ◽  
Oxide Thin Films ◽  
Ozone Precursors ◽  
Layer Deposition
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