Beam plasma discharge at low magnetic field as plasma source for plasma processing reactor

Vacuum ◽  
2009 ◽  
Vol 83 (11) ◽  
pp. 1350-1354 ◽  
Author(s):  
E.G. Shustin ◽  
N.V. Isaev ◽  
M.P. Temiryazeva ◽  
Yu.V. Fedorov
Keyword(s):  
Magnetic Field ◽  
Plasma Processing ◽  
Plasma Source ◽  
Plasma Discharge ◽  
Beam Plasma ◽  
Low Magnetic Field

Production of Quiescent Plasmas in a Magnetic Field by a Beam-Plasma Discharge

1972 ◽  
Vol 28 (12) ◽  
pp. 723-726 ◽  
Author(s):  
D. Bollinger ◽  
D. Boyd ◽  
H. Liu ◽  
M. Seidl
Keyword(s):  
Magnetic Field ◽  
Plasma Discharge ◽  
Beam Plasma

Effect of an external RF field on the beam-plasma discharge in a magnetic field

2000 ◽  
Vol 26 (4) ◽  
pp. 366-368
Author(s):  
A. A. Ivanov ◽  
L. N. Knyazev ◽  
A. A. Luk’yanov ◽  
S. V. Murav’ev ◽  
A. A. Serov ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Plasma Discharge ◽  
Beam Plasma

Electron beam injection experiments: The beam-plasma discharge at low pressures and magnetic field strengths

1978 ◽  
Vol 5 (2) ◽  
pp. 127-130 ◽  
Author(s):  
W. Bernstein ◽  
H. Leinbach ◽  
P. Kellogg ◽  
S. Monson ◽  
T. Hallinan ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Electron Beam ◽  
Plasma Discharge ◽  
Beam Injection ◽  
Beam Plasma ◽  
Low Pressures ◽  
Field Strengths

Control of the energy of ion flow affecting electrically insulated surface in plasma processing reactor based on a beam plasma discharge

Vacuum ◽  
2011 ◽  
Vol 85 (6) ◽  
pp. 711-717 ◽  
Author(s):  
E.G. Shustin ◽  
N.V. Isaev ◽  
I.L. Klykov ◽  
V.V. Peskov
Keyword(s):  
Plasma Processing ◽  
Plasma Discharge ◽  
Ion Flow ◽  
Beam Plasma

Effects of ambient plasma and background temperature on the beam–plasma instability and beam–plasma discharge at low pressures in bounded systems

1982 ◽  
Vol 27 (2) ◽  
pp. 363-376
Author(s):  
I. Roth ◽  
S. Cuperman
Keyword(s):  
Magnetic Field ◽  
Plasma Discharge ◽  
Finite Radius ◽  
Ionized Gas ◽  
Plasma System ◽  
Beam Plasma ◽  
Background Temperature ◽  
Beam Plasma Instability ◽  
Low Pressures ◽  
Electron Beam Plasma

The electrostatic instability of bounded beam –plasma systems as well as its consequences on the ignition of the beam –plasma discharge (BPD) at low pressures and magnetic field strengths are investigated. For this purpose, configurations consisting of a finite radius electron-beam –plasma system whose edge is far away from a confining coaxial metallic container are considered; an ambient, partially ionized gas filling the container is also present.

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