An electron-beam plasma source and geometry for plasma processing
1993 ◽
Vol 2
(2)
◽
pp. 100-105
◽
2007 ◽
Vol 50
(6)
◽
pp. 521-527
◽
1980 ◽
Vol 342
(1 Ultrasoft X-R)
◽
pp. 53-64
◽
Keyword(s):
2020 ◽
Vol 12
(1)
◽
pp. 36-43
Keyword(s):
2020 ◽
Vol 12
(1)
◽
pp. 5-11