Uniform high-reflectivity silver film deposited by planar magnetron sputtering

Vacuum ◽  
2021 ◽  
Vol 185 ◽  
pp. 109999
Author(s):  
Liyang Mao ◽  
Yanquan Geng ◽  
Yongzhi Cao ◽  
Yongda Yan
Keyword(s):  
Magnetron Sputtering ◽  
Silver Film ◽  
High Reflectivity ◽  
Planar Magnetron

Copper Filling of Deep Sub-µm Through-Holes by High-Vacuum Planar Magnetron Sputtering Using Argon Gas with Added Nitrogen: Optimum Quantity of Nitrogen in Argon Gas

2006 ◽  
Vol 45 (2A) ◽  
pp. 736-738 ◽  
Author(s):  
Shigeru Saito ◽  
Yoshio Uhara ◽  
Takahide Uenosono ◽  
Jyunichi Nagata ◽  
Minemasa Oyama ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Vacuum ◽  
Argon Gas ◽  
Optimum Quantity ◽  
Planar Magnetron

The erosion groove effects on RF planar magnetron sputtering

2017 ◽  
Vol 309 ◽  
pp. 573-578 ◽  
Author(s):  
Rabah Tadjine ◽  
Mounes M. Alim ◽  
Mohamed Kechouane
Keyword(s):  
Magnetron Sputtering ◽  
Planar Magnetron

rf planar magnetron sputtering and characterization of ferroelectric Pb(Zr,Ti)O3films

1983 ◽  
Vol 54 (11) ◽  
pp. 6601-6609 ◽  
Author(s):  
S. B. Krupanidhi ◽  
N. Maffei ◽  
M. Sayer ◽  
K. El‐Assal
Keyword(s):  
Magnetron Sputtering ◽  
Planar Magnetron
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