Effect of a dielectric cavity on the ion etching of dielectrics by electron beam-produced plasma generated by a forevacuum plasma electron source

Vacuum ◽  
2021 ◽  
pp. 110483
Author(s):  
D.B. Zolotukhin ◽  
E.M. Oks ◽  
A.V. Tyunkov ◽  
E.V. Yakovlev ◽  
Yu G. Yushkov
Keyword(s):  
Electron Beam ◽  
Plasma Electron ◽  
Electron Source ◽  
Ion Etching ◽  
Plasma Electron Source ◽  
Dielectric Cavity

Ribbon electron beam formation by a forevacuum plasma electron source

2016 ◽  
Vol 42 (1) ◽  
pp. 96-99 ◽  
Author(s):  
A. S. Klimov ◽  
V. A. Burdovitsin ◽  
A. A. Grishkov ◽  
E. M. Oks ◽  
A. A. Zenin ◽  
...  
Keyword(s):  
Electron Beam ◽  
Plasma Electron ◽  
Electron Source ◽  
Plasma Electron Source ◽  
Beam Formation

A Fore-Vacuum Plasma Electron Source of a Focused Electron Beam

2019 ◽  
Vol 83 (11) ◽  
pp. 1402-1406 ◽  
Author(s):  
I. Yu. Bakeev ◽  
A. S. Klimov ◽  
E. M. Oks ◽  
A. A. Zenin
Keyword(s):  
Electron Beam ◽  
Plasma Electron ◽  
Electron Source ◽  
Vacuum Plasma ◽  
Plasma Electron Source

Hollow cathode vacuum arc plasma electron source for the generation of a high-current DC electron beam

Vacuum ◽  
2016 ◽  
Vol 134 ◽  
pp. 83-87 ◽  
Author(s):  
Jianping Xu ◽  
Xiubo Tian ◽  
Chunzhi Gong ◽  
Chunwei Li ◽  
Chuang Yang
Keyword(s):  
Electron Beam ◽  
Hollow Cathode ◽  
Plasma Electron ◽  
Electron Source ◽  
Vacuum Arc ◽  
Arc Plasma ◽  
High Current ◽  
Plasma Electron Source

Electron beam focusing features in a plasma electron source under forevacuum pressures

2016 ◽  
Vol 42 (7) ◽  
pp. 712-714 ◽  
Author(s):  
A. A. Zenin ◽  
I. Yu. Bakeev ◽  
Yu. A. Burachevskii ◽  
A. S. Klimov ◽  
E. M. Oks
Keyword(s):  
Electron Beam ◽  
Plasma Electron ◽  
Electron Source ◽  
Beam Focusing ◽  
Plasma Electron Source
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