Atomic emission spectrometry with an induction-coupled high-frequency plasma source

1973 ◽  
Vol 64 (3) ◽  
pp. 353-362 ◽  
Author(s):  
G.F. Kirkbright ◽  
A.F. Ward ◽  
T.S. West
Keyword(s):  
High Frequency ◽  
Plasma Source ◽  
Atomic Emission ◽  
Atomic Emission Spectrometry ◽  
Emission Spectrometry ◽  
High Frequency Plasma ◽  
Frequency Plasma

scholarly journals Ultra High Frequency Plasma Source Using Multi-Window Type Antenna.

Shinku ◽  
1998 ◽  
Vol 41 (3) ◽  
pp. 307-310
Author(s):  
Yukito NAKAGAWA ◽  
Etsuo WANI ◽  
Hisaaki SATO ◽  
Seiji SAMUKAWA ◽  
Tsutomu TSUKADA
Keyword(s):  
High Frequency ◽  
Plasma Source ◽  
Ultra High Frequency ◽  
High Frequency Plasma ◽  
Frequency Plasma

New Ultra-High-Frequency Plasma Source for Large-Scale Etching Processes

1995 ◽  
Vol 34 (Part 1, No. 12B) ◽  
pp. 6805-6808 ◽  
Author(s):  
Seiji Samukawa ◽  
Yukito Nakagawa ◽  
Tsutomu Tsukada ◽  
Hiroyuki Ueyama ◽  
Kibatsu Shinohara
Keyword(s):  
High Frequency ◽  
Large Scale ◽  
Plasma Source ◽  
Ultra High Frequency ◽  
High Frequency Plasma ◽  
Frequency Plasma
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