Time-resolved cavity ring-down spectroscopic study of the gas phase and surface loss rates of Si and SiH3 plasma radicals
2002 ◽
Vol 360
(1-2)
◽
pp. 189-193
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Keyword(s):
2006 ◽
Vol 330
(1-2)
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pp. 155-165
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2010 ◽
Vol 28
(2)
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pp. 360-372
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Keyword(s):
2021 ◽
Vol 408
◽
pp. 113107
Keyword(s):
1996 ◽
Vol 250
(1)
◽
pp. 111-119
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1999 ◽
Vol 68
(3)
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pp. 171-181
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1998 ◽
Vol 563
(1-2)
◽
pp. 147-152
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