Study on dopant activation of phosphorous implanted polycrystalline silicon thin films by KrF excimer laser annealing
2002 ◽
Vol 46
(8)
◽
pp. 1085-1090
◽
Keyword(s):
Crystal Growth of Silicon Thin Films on Glass by Excimer Laser Annealing: A Molecular-Dynamics Study
2006 ◽
Vol 45
(5B)
◽
pp. 4344-4346
◽
Keyword(s):
2011 ◽
Vol 49
(7)
◽
pp. 804-810
◽
Keyword(s):
Keyword(s):
Keyword(s):
1994 ◽
Vol 33
(Part 1, No. 8)
◽
pp. 4491-4498
◽