Crystal Growth of Silicon Thin Films on Glass by Excimer Laser Annealing: A Molecular-Dynamics Study

2006 ◽  
Vol 45 (5B) ◽  
pp. 4344-4346 ◽  
Author(s):  
Shinji Munetoh ◽  
Takahide Kuranaga ◽  
Byoung Min Lee ◽  
Teruaki Motooka ◽  
Takahiko Endo ◽  
...  
Keyword(s):  
Thin Films ◽  
Molecular Dynamics ◽  
Crystal Growth ◽  
Excimer Laser ◽  
Laser Annealing ◽  
Excimer Laser Annealing ◽  
Silicon Thin Films

Nucleation Process During Excimer Laser Annealing of Amorphous Silicon Thin Films on Glass: A Molecular-dynamics Study

2006 ◽  
Vol 958 ◽  
Author(s):  
Shinji Munetoh ◽  
Takanori Mitani ◽  
Takahide Kuranaga ◽  
Teruaki Motooka
Keyword(s):  
Thin Films ◽  
Molecular Dynamics ◽  
Amorphous Silicon ◽  
Excimer Laser ◽  
Laser Annealing ◽  
Surface Region ◽  
Excimer Laser Annealing ◽  
Silicon Thin Films ◽  
Steady State Temperature ◽  
Dynamics Simulations

ABSTRACTWe have performed molecular-dynamics simulations of heating, melting and recrystallization processes in amorphous silicon (a-Si) thin films deposited on glass during excimer laser annealing. By partially heating the a-Si surface region with 2 nm depth and removing thermal energy from the bottom of the glass substrate, a steady-state temperature profile was obtained in the a-Si layer with the thickness of 15 nm and only the surface region was melted. It was found that nucleation predominantly occurred in the a-Si region as judged by the coordination numbers and diffusion constants of atoms in the region. The results suggest that nucleation occurs in unmelted residual a-Si region during the laser irradiation and then crystal growth proceeds toward liquid Si region under the near-complete melting condition.

Study on dopant activation of phosphorous implanted polycrystalline silicon thin films by KrF excimer laser annealing

2002 ◽  
Vol 46 (8) ◽  
pp. 1085-1090 ◽  
Author(s):  
Chang-Ho Tseng ◽  
Ching-Wei Lin ◽  
Teh-Hung Teng ◽  
Ting-Kuo Chang ◽  
Huang-Chung Cheng ◽  
...  
Keyword(s):  
Thin Films ◽  
Excimer Laser ◽  
Polycrystalline Silicon ◽  
Laser Annealing ◽  
Excimer Laser Annealing ◽  
Dopant Activation ◽  
Silicon Thin Films ◽  
Krf Excimer Laser

Transient temperature measurement of amorphous silicon thin films during excimer laser annealing

1999 ◽  
Author(s):  
Seung-Jae Moon ◽  
Ming-Hong Lee ◽  
Mutsuko Hatano ◽  
Kenkichi Suzuki ◽  
Constantine P. Grigoropoulos
Keyword(s):  
Thin Films ◽  
Temperature Measurement ◽  
Amorphous Silicon ◽  
Excimer Laser ◽  
Laser Annealing ◽  
Transient Temperature ◽  
Excimer Laser Annealing ◽  
Silicon Thin Films

scholarly journals Formation of Si nanoclusters in amorphous silicon thin films by excimer laser annealing

1999 ◽  
Vol 35 (23) ◽  
pp. 2058 ◽  
Author(s):  
Jiun-Lin Yeh ◽  
Hsuen-Li Chen ◽  
An Shih ◽  
Si-chen Lee
Keyword(s):  
Thin Films ◽  
Amorphous Silicon ◽  
Excimer Laser ◽  
Laser Annealing ◽  
Excimer Laser Annealing ◽  
Silicon Thin Films

scholarly journals In-Situ and Ex-Situ Measurements on Silicon Thin Films Fabricated by Excimer Laser Annealing

2006 ◽  
Vol 48 ◽  
pp. 937-944 ◽  
Author(s):  
Chil-Chyuan Kuo ◽  
Wen-Chang Yeh ◽  
Ji-Feng Lee ◽  
Jeng-Ywan Jeng1
Keyword(s):  
Thin Films ◽  
Excimer Laser ◽  
Laser Annealing ◽  
Ex Situ ◽  
Excimer Laser Annealing ◽  
Silicon Thin Films

Defects in Polycrystalline Silicon Thin-Films Crystallized by Solid Phase and Excimer Laser Annealing

2003 ◽  
Vol 93 ◽  
pp. 161-166
Author(s):  
Koichi Kitahara ◽  
K. Ohnishi ◽  
Y. Katoh ◽  
K. Watakabe ◽  
A. Moritani
Keyword(s):  
Thin Films ◽  
Excimer Laser ◽  
Polycrystalline Silicon ◽  
Laser Annealing ◽  
Solid Phase ◽  
Excimer Laser Annealing ◽  
Silicon Thin Films

Dynamics of the excimer laser annealing of hydrogenated amorphous silicon thin films

1999 ◽  
Vol 75 (4) ◽  
pp. 498-500 ◽  
Author(s):  
G. Ivlev ◽  
E. Gatskevich ◽  
V. Cháb ◽  
J. Stuchlı́k ◽  
V. Vorlı́ček ◽  
...  
Keyword(s):  
Thin Films ◽  
Amorphous Silicon ◽  
Excimer Laser ◽  
Laser Annealing ◽  
Hydrogenated Amorphous Silicon ◽  
Excimer Laser Annealing ◽  
Silicon Thin Films ◽  
Hydrogenated Amorphous
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