Transmission electron microscopy study of silicon nitride amorphous films obtained by reactive pulsed laser deposition
2012 ◽
Vol 48
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pp. 125-131
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2002 ◽
Vol 82
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pp. 553-558
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1997 ◽
Vol 292
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pp. 313-317
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2002 ◽
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pp. 735-749
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1996 ◽
Vol 74
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pp. 57-66
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