Transmission electron microscopy study of silicon nitride amorphous films obtained by reactive pulsed laser deposition

2001 ◽  
Vol 397 (1-2) ◽  
pp. 12-16 ◽  
Author(s):  
V.S Teodorescu ◽  
L.C Nistor ◽  
M Popescu ◽  
I.N Mihailescu ◽  
E Gyorgy ◽  
...  
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