Hydrophilicity of TiO2 thin films obtained by radio frequency magnetron sputtering deposition

2002 ◽  
Vol 422 (1-2) ◽  
pp. 55-61 ◽  
Author(s):  
L Sirghi ◽  
T Aoki ◽  
Y Hatanaka
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Tio2 Thin Films ◽  
Sputtering Deposition

Absorption spectra of TiO2 thin films synthesized by the reactive radio-frequency magnetron sputtering of titanium

2014 ◽  
Vol 48 (7) ◽  
pp. 848-858 ◽  
Author(s):  
V. M. Ievlev ◽  
S. B. Kushchev ◽  
A. N. Latyshev ◽  
L. Yu. Leonova ◽  
O. V. Ovchinnikov ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Absorption Spectra ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Tio2 Thin Films

Wafer-Scale Growth of ITO Nanorods by Radio Frequency Magnetron Sputtering Deposition

2011 ◽  
Vol 158 (5) ◽  
pp. K131 ◽  
Author(s):  
Jae Hyoung Park ◽  
Hoo Keun Park ◽  
Jinhoo Jeong ◽  
Woong Kim ◽  
Byoung Koun Min ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Scale Growth ◽  
Sputtering Deposition ◽  
Wafer Scale
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