Wafer-Scale Growth of ITO Nanorods by Radio Frequency Magnetron Sputtering Deposition

Journal of The Electrochemical Society ◽

10.1149/1.3562943 ◽

2011 ◽

Vol 158 (5) ◽

pp. K131 ◽

Author(s):

Jae Hyoung Park ◽

Hoo Keun Park ◽

Jinhoo Jeong ◽

Woong Kim ◽

Byoung Koun Min ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Scale Growth ◽

Sputtering Deposition ◽

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Extending the Photoresponse of TiO2to the Visible Light Region: Photoelectrochemical Behavior of TiO2Thin Films Prepared by the Radio Frequency Magnetron Sputtering Deposition Method

The Journal of Physical Chemistry B ◽

10.1021/jp058262g ◽

2006 ◽

Vol 110 (11) ◽

pp. 5537-5541 ◽

Author(s):

Hisashi Kikuchi ◽

Masaaki Kitano ◽

Masato Takeuchi ◽

Masaya Matsuoka ◽

Masakazu Anpo ◽

...

Keyword(s):

Magnetron Sputtering ◽

Visible Light ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Deposition Method ◽

Visible Light Region ◽

Radio Frequency Magnetron Sputtering ◽

Sputtering Deposition ◽

Light Region ◽

Magnetron Sputtering Deposition Method

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Radio frequency magnetron sputtering deposition of hetero-epitaxial strontium barium niobate thin films (SrxBa1−xNb2O6)

Journal of Applied Physics ◽

10.1063/1.1535749 ◽

2003 ◽

Vol 93 (3) ◽

pp. 1718-1724 ◽

Author(s):

M. Cuniot-Ponsard ◽

J. M. Desvignes ◽

B. Ea-Kim ◽

E. Leroy

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Strontium Barium Niobate ◽

Strontium Barium ◽

Sputtering Deposition

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Radio frequency magnetron sputtering deposition of calcium phosphate coatings: The effect of resputtering on the coating composition

Journal of Applied Physics ◽

10.1063/1.1576894 ◽

2003 ◽

Vol 93 (12) ◽

pp. 9503-9507 ◽

Author(s):

B. Feddes ◽

J. G. C. Wolke ◽

J. A. Jansen ◽

A. M. Vredenberg

Keyword(s):

Calcium Phosphate ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Sputtering Deposition ◽

Phosphate Coatings ◽

Coating Composition ◽

Calcium Phosphate Coatings

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Radio frequency magnetron sputtering deposition of borate and phosphate glass films

10.1117/12.756819 ◽

2007 ◽

Author(s):

Lucica Boroica ◽

I. Boroica ◽

E. Rotiu ◽

B. Sava ◽

R. Medianu ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Phosphate Glass ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Sputtering Deposition ◽

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Preparation of Nitrogen-Substituted TiO2Thin Film Photocatalysts by the Radio Frequency Magnetron Sputtering Deposition Method and Their Photocatalytic Reactivity under Visible Light Irradiation†

The Journal of Physical Chemistry B ◽

10.1021/jp064893e ◽

2006 ◽

Vol 110 (50) ◽

pp. 25266-25272 ◽

Author(s):

Masaaki Kitano ◽

Keisho Funatsu ◽

Masaya Matsuoka ◽

Michio Ueshima ◽

Masakazu Anpo

Keyword(s):

Magnetron Sputtering ◽

Visible Light ◽

Radio Frequency ◽

Visible Light Irradiation ◽

Radio Frequency Magnetron ◽

Light Irradiation ◽

Deposition Method ◽

Radio Frequency Magnetron Sputtering ◽

Sputtering Deposition ◽

Magnetron Sputtering Deposition Method

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Radio Frequency Magnetron Sputtering Deposition of TiO2 Thin Films and Their Perovskite Solar Cell Applications

Scientific Reports ◽

10.1038/srep17684 ◽

2015 ◽

Vol 5 (1) ◽

Author(s):

Cong Chen ◽

Yu Cheng ◽

Qilin Dai ◽

Hongwei Song

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Perovskite Solar Cell ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Tio2 Thin Films ◽

Sputtering Deposition

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Ferroelectric characteristics of SrBi2Ta2O9 thin films fabricated by the radio frequency magnetron sputtering deposition technique

Surface and Coatings Technology ◽

10.1016/s0257-8972(97)00306-x ◽

1998 ◽

Vol 98 (1-3) ◽

pp. 908-911 ◽

Author(s):

Jeon-Kook Lee ◽

Tae Kwon Song ◽

Hyung-Jin Jung

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Deposition Technique ◽

Radio Frequency Magnetron Sputtering ◽

Sputtering Deposition

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Effects of Deposition Temperature and Hydrogen Plasma on the Properties of the Radio-Frequency Magnetron Sputtering Deposition of ZnO-Al2O3 Films

Intelligent Technologies and Engineering Systems - Lecture Notes in Electrical Engineering ◽

10.1007/978-1-4614-6747-2_90 ◽

2013 ◽

pp. 783-791

Author(s):

Fang-Hsing Wang ◽

Chia-Cheng Huang ◽

Chien-Chen Diao ◽

Chia-Ching Wu ◽

Cheng-Fu Yang

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Deposition Temperature ◽

Hydrogen Plasma ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Sputtering Deposition ◽

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Hydrophilicity of TiO2 thin films obtained by radio frequency magnetron sputtering deposition

Thin Solid Films ◽

10.1016/s0040-6090(02)00949-5 ◽

2002 ◽

Vol 422 (1-2) ◽

pp. 55-61 ◽

Author(s):

L Sirghi ◽

T Aoki ◽

Y Hatanaka

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Tio2 Thin Films ◽

Sputtering Deposition

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Radio frequency magnetron sputtering deposition of low-resistivity and broad-spectral transmission F and Al co-doped ZnO film with mobility exceeding 50 cm2 V−1 s−1

Optik ◽

10.1016/j.ijleo.2020.165105 ◽

2020 ◽

Vol 219 ◽

pp. 165105

Author(s):

Xudong Meng ◽

Huarong Zhang ◽

Xiaobo Zhang ◽

Guoxi Zheng ◽

Xicheng Xie ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Spectral Transmission ◽

Radio Frequency Magnetron Sputtering ◽

Zno Film ◽

Sputtering Deposition ◽

Low Resistivity ◽

Doped Zno ◽

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