Characterization of highly strained silicon-germanium alloys grown on silicon substrates using spectroscopic ellipsometry

Thin Solid Films ◽

10.1016/s0040-6090(97)00805-5 ◽

1998 ◽

Vol 313-314 ◽

pp. 167-171 ◽

Author(s):

Hosun Lee

Keyword(s):

Spectroscopic Ellipsometry ◽

Silicon Germanium ◽

Strained Silicon ◽

Silicon Substrates ◽

Highly Strained ◽

Silicon Germanium Alloys

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Kinetic lattice Monte Carlo simulations of interdiffusion in strained silicon germanium alloys

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.3294704 ◽

2010 ◽

Vol 28 (1) ◽

pp. C1G18-C1G23 ◽

Author(s):

Renyu Chen ◽

Scott T. Dunham

Keyword(s):

Monte Carlo ◽

Monte Carlo Simulations ◽

Silicon Germanium ◽

Strained Silicon ◽

Lattice Monte Carlo ◽

Kinetic Lattice Monte Carlo ◽

Silicon Germanium Alloys ◽

Kinetic Lattice

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Characterization of Biaxial Strained-Silicon by Spectroscopic Ellipsometry

ECS Meeting Abstracts ◽

10.1149/ma2007-02/19/1073 ◽

2007 ◽

Keyword(s):

Spectroscopic Ellipsometry ◽

Strained Silicon

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Enhancement of the electronic thermoelectric properties of bulk strained silicon-germanium alloys using the scattering relaxation times from first-principles calculations

Journal of Applied Physics ◽

10.1063/1.5117345 ◽

2019 ◽

Vol 126 (21) ◽

pp. 215103

Author(s):

F. Murphy-Armando

Keyword(s):

Thermoelectric Properties ◽

First Principles ◽

Silicon Germanium ◽

Relaxation Times ◽

Strained Silicon ◽

First Principles Calculations ◽

Silicon Germanium Alloys

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Structural Characterization of Strained Silicon Substrates by X-Ray Diffraction and Reflectivity

10.7567/ssdm.2003.d-6-2 ◽

2003 ◽

Author(s):

M. Erdtmann ◽

T. A. Langdo ◽

C. J. Vineis ◽

H. Badawi ◽

M. T. Bulsara

Keyword(s):

Structural Characterization ◽

Strained Silicon ◽

Silicon Substrates ◽

X Ray Diffraction ◽

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Elastically strain-sharing nanomembranes: flexible and transferable strained silicon and silicon–germanium alloys

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/40/4/r01 ◽

2007 ◽

Vol 40 (4) ◽

pp. R75-R92 ◽

Author(s):

Shelley A Scott ◽

Max G Lagally

Keyword(s):

Silicon Germanium ◽

Strained Silicon ◽

Silicon Germanium Alloys

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Real-time diagnostics of growth of silicon-germanium alloys on hydrogen-terminated and oxidized silicon (111) surfaces by spectroscopic ellipsometry

Thin Solid Films ◽

10.1016/s0040-6090(98)01685-x ◽

1999 ◽

Vol 343-344 ◽

pp. 427-432

Author(s):

Peter Hess ◽

Ingo Opahle

Keyword(s):

Real Time ◽

Spectroscopic Ellipsometry ◽

Silicon Germanium ◽

Silicon Germanium Alloys

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Growth, electrical properties and reciprocal lattice mapping characterization of heavily B-doped, highly strained silicon-molecular beam epitaxial structures

Journal of Crystal Growth ◽

10.1016/0022-0248(94)90054-x ◽

1994 ◽

Vol 143 (3-4) ◽

pp. 184-193 ◽

Author(s):

M.R. Sardela ◽

H.H. Radamson ◽

J.O. Ekberg ◽

J.-E. Sundgren ◽

G.V. Hansson

Keyword(s):

Electrical Properties ◽

Molecular Beam ◽

Reciprocal Lattice ◽

Strained Silicon ◽

Molecular Beam Epitaxial ◽

Highly Strained

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The characterization of hydrogenated amorphous silicon and epitaxial silicon thin films grown on crystalline silicon substrates by using spectroscopic ellipsometry

Acta Physica Sinica ◽

10.7498/aps.61.157803 ◽

2012 ◽

Vol 61 (15) ◽

pp. 157803

Author(s):

Wu Chen-Yang ◽

Gu Jin-Hua ◽

Feng Ya-Yang ◽

Xue Yuan ◽

Lu Jing-Xiao

Keyword(s):

Amorphous Silicon ◽

Spectroscopic Ellipsometry ◽

Crystalline Silicon ◽

Hydrogenated Amorphous Silicon ◽

Silicon Substrates ◽

Epitaxial Silicon ◽

Silicon Thin Films ◽

Hydrogenated Amorphous

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Optical functions of silicon-germanium alloys determined using spectroscopic ellipsometry

Optical Materials ◽

10.1016/0925-3467(93)90035-y ◽

1993 ◽

Vol 2 (2) ◽

pp. 105-117 ◽

Author(s):

G.E. Jellison ◽

T.E. Haynes ◽

H.H. Burke

Keyword(s):

Spectroscopic Ellipsometry ◽

Silicon Germanium ◽

Optical Functions ◽

Silicon Germanium Alloys

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SIMS characterization of amorphous silicon germanium alloys grown by hot-wire deposition

10.1063/1.57999 ◽

1999 ◽

Author(s):

R. C. Reedy ◽

A. R. Mason ◽

B. P. Nelson ◽

Y. Xu

Keyword(s):

Amorphous Silicon ◽

Silicon Germanium ◽

Hot Wire ◽

Amorphous Silicon Germanium ◽

Silicon Germanium Alloys

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