Non-destructive optical characterization of the surface region in bulk semiconductors and heterostructures

2000 ◽  
Vol 364 (1-2) ◽  
pp. 186-191 ◽  
Author(s):  
V Mizeikis ◽  
K Jarasiunas ◽  
N Lovergine ◽  
K Kuroda
2000 ◽  
Vol 5 (S1) ◽  
pp. 747-753
Author(s):  
E. Dogheche ◽  
B. Belgacem ◽  
D. Remiens ◽  
P. Ruterana ◽  
F. Omnes

An optical characterization technique is proposed for GaN based compounds deposited on sapphire. In AlGaN films grown by MOCVD, the film optical behavior and the substrate to layer interface are qualified from the measured optical data. The experimental and theoretical approach used for this purpose is described in detail. The results clearly show bending effects at the interface which may be related to structural defects; a good agreement with transmission electronic microscopy analysis is obtained.


1999 ◽  
Vol 595 ◽  
Author(s):  
E. Dogheche ◽  
B. Belgacem ◽  
D. Remiens ◽  
P. Ruterana ◽  
F. Omnes

AbstractAn optical characterization technique is proposed for GaN based compounds deposited on sapphire. In AlGaN films grown by MOCVD, the film optical behavior and the substrate to layer interface are qualified from the measured optical data. The experimental and theoretical approach used for this purpose is described in detail. The results clearly show bending effects at the interface which may be related to structural defects; a good agreement with transmission electronic microscopy analysis is obtained.


2020 ◽  
Vol 12 (4) ◽  
pp. 04022-1-04022-4
Author(s):  
Piyush Patel ◽  
◽  
S. M. Vyas ◽  
Vimal Patel ◽  
Himanshu Pavagadhi ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document