Modeling and control of MEMS with high speed synchronous micromotors and controllers/drivers-on-VLSI-chip ICs
2003 ◽
Vol 44
(5)
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pp. 667-679
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2019 ◽
Vol 20
(6)
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pp. 1221-1236
2018 ◽
Vol 3
(3)
◽
pp. 329-339
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Keyword(s):
2013 ◽
Vol 2013
◽
pp. 1-10
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Keyword(s):
2000 ◽
Keyword(s):
2014 ◽
Vol 13
(5)
◽
pp. 90-97
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2005 ◽
Vol 38
(1)
◽
pp. 13-18
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2000 ◽
Vol 66
(649)
◽
pp. 2981-2987