Heat and mass transfer phenomenon from an oxygen plasma to a semiconductor surface
2001 ◽
Vol 142-144
◽
pp. 959-963
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Keyword(s):
2014 ◽
Vol 66
(4)
◽
pp. 379-401
◽
Keyword(s):
2013 ◽
Vol 436
◽
pp. 830-838
◽
Keyword(s):
2011 ◽
Vol 661
(1)
◽
pp. 84-89
◽
Keyword(s):
2017 ◽
Vol 116
◽
pp. 48-59
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Keyword(s):