The effect of nitrogen on the mechanical properties of tetrahedral amorphous carbon films deposited with a filtered cathodic vacuum arc

1999 ◽  
Vol 120-121 ◽  
pp. 601-606 ◽  
Author(s):  
E. Liu ◽  
X. Shi ◽  
H.S. Tan ◽  
L.K. Cheah ◽  
Z. Sun ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Vacuum Arc ◽  
Amorphous Carbon Films ◽  
Tetrahedral Amorphous Carbon ◽  
Filtered Cathodic Vacuum Arc

Characterization of Boron- and Phosphorous-Incorporated Tetrahedral Amorphous Carbon Films Deposited by the Filtered Cathodic Vacuum Arc Process

2009 ◽  
Vol 48 (6) ◽  
pp. 065501 ◽  
Author(s):  
Omvir Singh Panwar ◽  
Mohd. Alim Khan ◽  
Mahesh Kumar ◽  
Sonnada Math Shivaprasad ◽  
Bukinakere Subbakrihniah Satyanarayana ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Carbon Films ◽  
Vacuum Arc ◽  
Amorphous Carbon Films ◽  
Tetrahedral Amorphous Carbon ◽  
Filtered Cathodic Vacuum Arc
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