Langmuir-probe measurements of a pulsed and steady-state rf glow-discharge source and of an rf planar-magnetron source

1996 ◽  
Vol 51 (13) ◽  
pp. 1629-1646 ◽  
Author(s):  
M.J. Heintz ◽  
G.M. Hieftje
Keyword(s):  
Steady State ◽  
Glow Discharge ◽  
Langmuir Probe ◽  
Discharge Source ◽  
Planar Magnetron ◽  
Rf Glow Discharge ◽  
Langmuir Probe Measurements ◽  
Glow Discharge Source ◽  
Probe Measurements

The potential of a modified rf glow discharge source for enhanced elemental speciation studies

1998 ◽  
Vol 35 (9) ◽  
pp. 281-283 ◽  
Author(s):  
Mikhail Belkin ◽  
Joseph W. Waggoner ◽  
Joseph A. Caruso
Keyword(s):  
Glow Discharge ◽  
Elemental Speciation ◽  
Discharge Source ◽  
Rf Glow Discharge ◽  
Glow Discharge Source

Amorphous to Crystalline Structural Transition during Growth of Silicon by Plasma Enhanced Chemical vapor Deposition

1988 ◽  
Vol 131 ◽  
Author(s):  
W. J. Varhue ◽  
S. Krause ◽  
J. Dea ◽  
C. O. Jung
Keyword(s):  
Glow Discharge ◽  
Structural Transition ◽  
Chemical Vapor ◽  
Plasma Potential ◽  
Transmission Electron ◽  
Rf Glow Discharge ◽  
Langmuir Probe Measurements ◽  
Si Films ◽  
Substantial Change ◽  
Probe Measurements

ABSTRACTThe growth of thin Si films by RF glow discharge undergoes a transition from amorphous to microcrystalline as power density is increased. This results in a substantial change in the film's electrical conductivity and activation energy for electrical conduction. The RF glow discharge has been characterized in terms of plasma density, plasma potential and electron temperature with emissive Langmuir Probe measurements. The structural transition has been observed with a transmission electron microscope.

Study of an RF planar magnetron sputtering discharge with Langmuir probe measurements

1998 ◽  
Vol 98 (1-3) ◽  
pp. 1426-1432 ◽  
Author(s):  
P.-Y. Jouan ◽  
A.-C. Vanderbecq ◽  
J.-P. Dauchot ◽  
M. Wautelet ◽  
M. Hecq
Keyword(s):  
Magnetron Sputtering ◽  
Langmuir Probe ◽  
Planar Magnetron ◽  
Langmuir Probe Measurements ◽  
Probe Measurements
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