Study of an RF planar magnetron sputtering discharge with Langmuir probe measurements
1998 ◽
Vol 98
(1-3)
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pp. 1426-1432
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Keyword(s):
2017 ◽
Vol 48
(1)
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pp. 61-66
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Keyword(s):
1996 ◽
Vol 51
(13)
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pp. 1629-1646
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1996 ◽
Vol 29
(1)
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pp. 99-104
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2017 ◽
Vol 35
(6)
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pp. 061308
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Keyword(s):
2004 ◽
Vol 44
(7-8)
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pp. 650-655
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2016 ◽
Vol 56
(8)
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pp. 1082-1089
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