Effects of gas pressure and r.f. power on the growth and properties of magnetron sputter deposited amorphous carbon thin films

2002 ◽  
Vol 11 (3-6) ◽  
pp. 1005-1009 ◽  
Author(s):  
J.L. Andújar ◽  
F.J. Pino ◽  
M.C. Polo ◽  
A. Pinyol ◽  
C. Corbella ◽  
...  
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Gas Pressure ◽  
Magnetron Sputter ◽  
Carbon Thin Films ◽  
Sputter Deposited

Gallium ion irradiation induced compaction and hardening of sputter deposited amorphous carbon thin films

2016 ◽  
Vol 112 ◽  
pp. 512-518
Author(s):  
Fritz Lehnert ◽  
Tilmann Häupl ◽  
Bernd Abel ◽  
S.G. Mayr
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Ion Irradiation ◽  
Carbon Thin Films ◽  
Sputter Deposited

Electron-diffraction studies of amorphous carbon thin films

1993 ◽  
Vol 51 ◽  
pp. 1100-1101
Author(s):  
David A. Muller
Keyword(s):  
Thin Films ◽  
Electron Diffraction ◽  
Amorphous Carbon ◽  
Glassy Carbon ◽  
Spherical Structure ◽  
Local Ordering ◽  
Carbon Arc ◽  
Similar Appearance ◽  
Carbon Thin Films ◽  
Large Spherical

The sp2 rich amorphous carbons have a wide variety of microstructures ranging from flat sheetlike structures such as glassy carbon to highly curved materials having similar local ordering to the fullerenes. These differences are most apparent in the region of the graphite (0002) reflection of the energy filtered diffracted intensity obtained from these materials (Fig. 1). All these materials consist mainly of threefold coordinated atoms. This accounts for their similar appearance above 0.8 Å-1. The fullerene curves (b,c) show a string of peaks at distance scales corresponding to the packing of the large spherical and oblate molecules. The beam damaged C60 (c) shows an evolution to the sp2 amorphous carbons as the spherical structure is destroyed although the (220) reflection in fee fcc at 0.2 Å-1 does not disappear completely. This 0.2 Å-1 peak is present in the 1960 data of Kakinoki et. al. who grew films in a carbon arc under conditions similar to those needed to form fullerene rich soots.

Atomic hydrogen interactions with amorphous carbon thin films

2009 ◽  
Vol 106 (7) ◽  
pp. 073305 ◽  
Author(s):  
Bhavin N. Jariwala ◽  
Cristian V. Ciobanu ◽  
Sumit Agarwal
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Atomic Hydrogen ◽  
Carbon Thin Films

Growth and characterization of radio frequency magnetron sputter-deposited zinc stannate, Zn2SnO4, thin films

2002 ◽  
Vol 92 (1) ◽  
pp. 310-319 ◽  
Author(s):  
David L. Young ◽  
Helio Moutinho ◽  
Yanfa Yan ◽  
Timothy J. Coutts
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zinc Stannate ◽  
Magnetron Sputter ◽  
Sputter Deposited

Temperature dependence of the mechanical properties of tetrahedrally coordinated amorphous carbon thin films

2005 ◽  
Vol 87 (16) ◽  
pp. 161915 ◽  
Author(s):  
David A. Czaplewski ◽  
J. P. Sullivan ◽  
T. A. Friedmann ◽  
J. R. Wendt
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Temperature Dependence ◽  
Amorphous Carbon ◽  
Carbon Thin Films

scholarly journals Hydrogenated amorphous carbon thin films deposition by pulsed DC plasma enhanced by electrostatic confinement

2014 ◽  
Vol 258 ◽  
pp. 219-224 ◽  
Author(s):  
S.M.M. Dufrène ◽  
F. Cemin ◽  
M.R.F. Soares ◽  
C. Aguzzoli ◽  
M.E.H. Maia da Costa ◽  
...  
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Dc Plasma ◽  
Hydrogenated Amorphous Carbon ◽  
Pulsed Dc ◽  
Electrostatic Confinement ◽  
Carbon Thin Films ◽  
Hydrogenated Amorphous

Electrical transport and morphological study of PLD-grown nanostructured amorphous carbon thin films

2006 ◽  
Vol 17 (20) ◽  
pp. 5244-5247 ◽  
Author(s):  
K Mohan Kant ◽  
N Mahipal Reddy ◽  
N Rama ◽  
K Sethupathi ◽  
M S Ramachandra Rao
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Electrical Transport ◽  
Morphological Study ◽  
Carbon Thin Films
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