Rapid thermal oxidation of highly in situ phosphorus doped polysilicon thin films

1998 ◽  
Vol 1 (3-4) ◽  
pp. 275-279 ◽  
Author(s):  
S Kallel ◽  
B Semmache ◽  
M Lemiti ◽  
A Laugier
Keyword(s):  
Thin Films ◽  
Thermal Oxidation ◽  
Rapid Thermal Oxidation ◽  
Phosphorus Doped

In situ study of porous silicon thin films thermal oxidation by pulsed laser photoacoustics

2018 ◽  
Vol 33 (8) ◽  
pp. 085001
Author(s):  
Atzin David Ruíz Pérez ◽  
M B de la Mora ◽  
J L Benítez ◽  
R Castañeda-Guzmán ◽  
Jorge Alejandro Reyes-Esqueda ◽  
...  
Keyword(s):  
Thin Films ◽  
Porous Silicon ◽  
Thermal Oxidation ◽  
Pulsed Laser ◽  
In Situ Study ◽  
Silicon Thin Films

Oxidation kinetics of Si and SiGe by dry rapid thermal oxidation, in-situ steam generation oxidation and dry furnace oxidation

2017 ◽  
Vol 121 (24) ◽  
pp. 245308 ◽  
Author(s):  
Fabien Rozé ◽  
Olivier Gourhant ◽  
Elisabeth Blanquet ◽  
François Bertin ◽  
Marc Juhel ◽  
...  
Keyword(s):  
Thermal Oxidation ◽  
Oxidation Kinetics ◽  
Steam Generation ◽  
Rapid Thermal Oxidation ◽  
Kinetics Of

Pd/Ta2O5/SiC Schottky-diode hydrogen sensors formed by using rapid thermal oxidation of Ta thin films

2013 ◽  
Vol 63 (9) ◽  
pp. 1794-1798 ◽  
Author(s):  
Sung-Jae Joo ◽  
Je Hoon Choi ◽  
Seong Jeen Kim ◽  
Sang-Cheol Kim
Keyword(s):  
Thin Films ◽  
Thermal Oxidation ◽  
Schottky Diode ◽  
Hydrogen Sensors ◽  
Rapid Thermal Oxidation

Microstructures of Polysilicon

1987 ◽  
Vol 106 ◽  
Author(s):  
R. Sinclair ◽  
A. H. Carim ◽  
J. Morgiel ◽  
J. C. Bravman
Keyword(s):  
Electron Microscopy ◽  
Thin Films ◽  
Transmission Electron Microscopy ◽  
Polycrystalline Silicon ◽  
Transmission Electron ◽  
Polysilicon Films ◽  
In Situ Heating ◽  
Phosphorus Doped ◽  
Microstructural Studies

ABSTRACTSome typical microstructural studies of polycrystalline silicon using transmission electron microscopy (TEM) are described, including the application of this material for assisting TEM investigations themselves. Examples include oxidation and realignment of polysilicon thin films, the structure of polysilicon in EEPROM devices, polysilicon in trench capacitors and measurement of SiO2 layer thicknesses with polysilicon overlayers. It is also shown tha grain growth in heavily phosphorus doped polysilicon films can be followed by in situ heating in the TEM.

Growth and physical properties of in situ phosphorus-doped RTLPCVD polycrystalline silicon thin films

1998 ◽  
Vol 1 (3-4) ◽  
pp. 299-302 ◽  
Author(s):  
S Kallel ◽  
B Semmache ◽  
M Lemiti ◽  
Ch Dubois ◽  
H Jaffrezic ◽  
...  
Keyword(s):  
Thin Films ◽  
Physical Properties ◽  
Polycrystalline Silicon ◽  
Silicon Thin Films ◽  
Phosphorus Doped

Fabrication of Epitaxial Cu$_{2}$O (111) Films from Cu(111) thin Films by Rapid Thermal Oxidation

2020 ◽  
Vol 70 (11) ◽  
pp. 914-919
Author(s):  
Miyeon CHEON ◽  
Yousil LEE ◽  
Sujae KIM ◽  
Se Young jeong*
Keyword(s):  
Thin Films ◽  
Thermal Oxidation ◽  
Rapid Thermal Oxidation
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