Oxidation kinetics of Si and SiGe by dry rapid thermal oxidation, in-situ steam generation oxidation and dry furnace oxidation
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
2013 ◽
Vol 98
(1)
◽
pp. 22-36
◽
Keyword(s):
1989 ◽
Vol 136
(9)
◽
pp. 2673-2676
◽
1998 ◽
Vol 1
(3-4)
◽
pp. 275-279
◽
2012 ◽
Vol 523
◽
pp. 107-112
◽