In-Situ Monitoring of Thin-Film Quality Using Evanescent Microwave Local Imaging Probes with Near-Atomic Resolution

2000 ◽  
Vol 33 (28) ◽  
pp. 129-134
Author(s):  
Massood Tabib-Azar ◽  
R. Wang ◽  
D. Park ◽  
S.R. LeClair
1994 ◽  
Author(s):  
Per Skytt ◽  
Carl J. Englund ◽  
Nial Wassdahl ◽  
Derrick C. Mancini ◽  
Joseph Nordgren

2010 ◽  
Vol 35 (18) ◽  
pp. 9888-9892 ◽  
Author(s):  
R. Delmelle ◽  
G. Bamba ◽  
J. Proost

2013 ◽  
Vol 38 (24) ◽  
pp. 5385 ◽  
Author(s):  
Farzia Karim ◽  
Tanujjal Bora ◽  
Mayur B. Chaudhari ◽  
Khaled Habib ◽  
Waleed S. Mohammed ◽  
...  

2013 ◽  
Vol 102 (17) ◽  
pp. 173302 ◽  
Author(s):  
Wing C. Tsoi ◽  
Weimin Zhang ◽  
Joseph Razzell Hollis ◽  
Minwon Suh ◽  
Martin Heeney ◽  
...  

1994 ◽  
Vol 45 (7) ◽  
pp. 743-744
Author(s):  
Yukio AKIBA ◽  
Yoichi HIROSE ◽  
Tateki KUROSU ◽  
Masamori IIDA

2010 ◽  
Author(s):  
M. Novotny ◽  
J. Bulir ◽  
J. Lancok ◽  
P. Pokorny ◽  
M. Bodnar ◽  
...  
Keyword(s):  

Author(s):  
Hongseok Choi ◽  
Arindom Datta ◽  
Xiaochun Li

This paper studies the fabrication and calibration of thin film temperature sensors embedded in metal structures. Thin film thermocouples have been successfully fabricated on various metal substrates and advanced embedding techniques have been developed to ensure sensor function inside metal structures. Thin film thermocouple was insulated with multiple thin film layers (Al2O3 and Si3N4) by e-beam evaporating and plasma enhanced chemical vapor deposition (PECVD). The sensors are calibrated. These embedded thin film sensors provide superior spatial and temporal resolution that is not possible with traditional sensors used in various manufacturing processes. This research is significant in a way that it provides a new and improved route for in-situ monitoring of manufacturing process.


2018 ◽  
Vol 5 (5) ◽  
pp. 10997-11003 ◽  
Author(s):  
Wanwisa Limphirat ◽  
W. Inprasit ◽  
T. Juagwon ◽  
P. Prachopchok ◽  
M. Duriyarattakarn ◽  
...  

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