Spectrum analysis of plasma produced by pulsed laser ablation of GaAs

2007 ◽  
Vol 73 (2) ◽  
pp. 231-239 ◽  
Author(s):  
AI HUA LIU

Abstract.A time-resolved diagnostic technique was used to investigate the emission spectra from the plasmas produced by 1.06 μm, 10 ns pulsed laser ablation of semiconductor GaAs. The characteristics of the species in plasma produced at different ambient pressure were analyzed. The full width at half maximum of the spectral line was measured and analyzed according to obtained spectra of the excited atoms; several line broadening factors were estimated according to our experimental conditions and the results indicate that the Stark broadening is the main broadening mechanism. Under the assumption of local thermodynamic equilibrium, the time evolution of electron number density was deduced from the Stark broadening measurements.

1999 ◽  
Vol 18 (3) ◽  
pp. 99-109 ◽  
Author(s):  
Yongxin Tang ◽  
Zhenhui Han ◽  
Qizong Qin

Pulsed laser ablation of TiO2 at 355 nm and 532 nm has been investigated using an angleand time-resolved quadrupole mass spectrometric technique. The major ablated species include O (m/e = 16), O2 (m/e = 32), Ti (m/e = 48), TiO (m/e = 64) and TiO2 (m/e = 80). The time-of-flight (TOF) spectra of ablated species are measured for the ionic and neutral ablated species, and they can be fitted by a Maxwell – Boltzmann (M – B) distribution with a center-of-mass velocity. The measured angular distributions of the ionic species (O+ and Ti+) and the neutral species (O and Ti) can be fitted with cos⁡nθ and a cos⁡θ + (1−a)cos⁡nθ, respectively. In addition, a continuous wave oxygen molecular beam is introduced into the ablated plume, and the enhancement of the signal intensities of TiO is observed. It implies that the ablated Ti atoms/ions species can react with ambient oxygen molecules in the gas phase. In the meanwhile, the physicochemical mechanism of pulsed laser ablation of TiO2 is discussed.


1998 ◽  
Vol 526 ◽  
Author(s):  
Takeshi Sasaki ◽  
Xiaoyan Zeng ◽  
Naoto Koshizaki

AbstractNanoparticles of iron oxide were prepared by pulsed laser ablation on carbon coated mica substrates. An ArF excimer laser was used to irradiate a Fe2O3 target in atmospheres of Ar at room temperature. The effects of ambient pressure on size and morphology of nanoparticles were investigated using transmission electron microscopy. The morphology of the deposited nanoparticles was strongly dependent on the ablation pressure. The formations of nanoparticles and their aggregates were observed at pressures higher than 46.7 Pa and 267 Pa of Ar, respectively. The size of the primary nanoparticles ranged from 2 – 9 nm and their size distribution agreed with a log-normal distribution function. The aggregate size increased with ambient pressure and the primary particle size was independent of ambient pressure.


1997 ◽  
Vol 51 (12) ◽  
pp. 1910-1915 ◽  
Author(s):  
B. Y. Man ◽  
X. T. Wang ◽  
G. T. Wang

Simultaneous time- and space-resolved emission spectra from a Nd: YAG laser-ablated plasma on an Al target have yielded quantitative information on the generation and the propagation of species in the plasma. Five ambient pressures from atmosphere to 5 Pa were chosen. The experimental results showed that the characteristics of the species in the plasma were strongly influenced by the ambient pressure. The mean spatially projected ranges of Al2+ ions in the atmosphere of different densities were calculated in theory, and the slowing-down processes were simulated by using a popular Monte Carlo simulation program, TRIM90. The calculated results can be used to explain observed experimental phenomena.


2003 ◽  
Vol 42 (Part 2, No. 5A) ◽  
pp. L479-L481 ◽  
Author(s):  
Masakazu Matsubara ◽  
Tetsuya Yamaki ◽  
Hisayoshi Itoh ◽  
Hiroaki Abe ◽  
Keisuke Asai

2006 ◽  
Author(s):  
R. Sanginés de Castro ◽  
C. Sánchez Aké ◽  
H. Sobral ◽  
M. Villagrán-Muniz

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