scholarly journals Practical Determination of Spatial Resolution in Atom Probe Tomography

2009 ◽  
Vol 15 (S2) ◽  
pp. 12-13 ◽  
Author(s):  
TF Kelly ◽  
E Voelkl ◽  
BP Geiser
Keyword(s):  
Spatial Resolution ◽  
Atom Probe Tomography ◽  
Atom Probe

Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Doping Profile Measurements in a 65-nm Commercial Product Using Atom Probe Tomography

2008 ◽  
Author(s):  
Lev Klibanov ◽  
Dick James ◽  
Dieter Isheim
Keyword(s):  
Spatial Resolution ◽  
Atom Probe Tomography ◽  
Doping Concentration ◽  
Semiconductor Industry ◽  
Three Dimensional ◽  
Atom Probe ◽  
Doping Profile ◽  
Commercial Product ◽  
Microscopy Technique ◽  
Compositional Information

Abstract Doping profile measurements in extremely small features like transistor gates or source/drain regions is a challenging task for the semiconductor industry. In our article, we successfully used an atom probe tomography (APT) tool to measure the doping concentration and profile of the dopant elements in a commercial 65 nm product. APT not only delivers doping concentrations but also gives the highest spatial resolution (sub-1 nm) three-dimensional compositional information of any microscopy technique.

Influence of surface migration on the spatial resolution of pulsed laser atom probe tomography

2010 ◽  
Vol 108 (4) ◽  
pp. 044904 ◽  
Author(s):  
B. Gault ◽  
M. Müller ◽  
A. La Fontaine ◽  
M. P. Moody ◽  
A. Shariq ◽  
...  
Keyword(s):  
Spatial Resolution ◽  
Atom Probe Tomography ◽  
Pulsed Laser ◽  
Atom Probe ◽  
Surface Migration

Atom probe tomography of ion-irradiated ultra-thin Fe/Cr/Fe trilayers with sub-nm spatial resolution

2012 ◽  
Vol 45 (50) ◽  
pp. 505303 ◽  
Author(s):  
H Gnaser ◽  
R Schiller ◽  
M Wahl ◽  
B Reuscher ◽  
A Zeuner ◽  
...  
Keyword(s):  
Spatial Resolution ◽  
Atom Probe Tomography ◽  
Atom Probe

scholarly journals Quantitative Evaluation of Spinodal Decomposition in Fe-Cr by Atom Probe Tomography and Radial Distribution Function Analysis

2013 ◽  
Vol 19 (3) ◽  
pp. 665-675 ◽  
Author(s):  
Jing Zhou ◽  
Joakim Odqvist ◽  
Mattias Thuvander ◽  
Peter Hedström
Keyword(s):  
Distribution Function ◽  
Radial Distribution Function ◽  
Spinodal Decomposition ◽  
Radial Distribution ◽  
Atom Probe Tomography ◽  
Function Analysis ◽  
Atom Probe ◽  
Theoretical Treatment ◽  
Low Temperature Aging

AbstractNanostructure evolution during low temperature aging of three binary Fe-Cr alloys has been investigated by atom probe tomography. A new method based on radial distribution function (RDF) analysis to quantify the composition wavelength and amplitude of spinodal decomposition is proposed. Wavelengths estimated from RDF have a power-law type evolution and are in reasonable agreement with wavelengths estimated using other more conventional methods. The main advantages of the proposed method are the following: (1) Selecting a box size to generate the frequency diagram, which is known to generate bias in the evaluation of amplitude, is avoided. (2) The determination of amplitude is systematic and utilizes the wavelength evaluated first to subsequently evaluate the amplitude. (3) The RDF is capable of representing very subtle decomposition, which is not possible using frequency diagrams, and thus a proposed theoretical treatment of the experimental RDF creates the possibility to determine amplitude at very early stages of spinodal decomposition.

A New Approach to the Determination of Concentration Profiles in Atom Probe Tomography

2012 ◽  
Vol 18 (2) ◽  
pp. 359-364 ◽  
Author(s):  
Peter J. Felfer ◽  
Baptiste Gault ◽  
Gang Sha ◽  
Leigh Stephenson ◽  
Simon P. Ringer ◽  
...  
Keyword(s):  
Atom Probe Tomography ◽  
Three Dimensional ◽  
Atom Probe ◽  
Solute Concentration ◽  
Concentration Profiles ◽  
Field Evaporation ◽  
New Approach ◽  
Depth Direction ◽  
Spread Function

AbstractAtom probe tomography (APT) provides three-dimensional analytical imaging of materials with near-atomic resolution using pulsed field evaporation. The processes of field evaporation can cause atoms to be placed at positions in the APT reconstruction that can deviate slightly from their original site in the material. Here, we describe and model one such process—that of preferential retention of solute atoms in multicomponent systems. Based on relative field evaporation probabilities, we calculate the point spread function for the solute atom distribution in the “z,” or in-depth direction, and use this to extract more accurate solute concentration profiles.

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