Simultaneous quantitative determination of the distribution of dopants in silicon by high mass resolution secondary ion mass spectrometry

1989 ◽  
Vol 61 (5) ◽  
pp. 412-416 ◽  
Author(s):  
Gerhard. Stingeder ◽  
Kurt. Piplits ◽  
Stefan. Gara ◽  
Manfred. Grasserbauer ◽  
Matthias. Budil ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Quantitative Determination ◽  
Secondary Ion Mass Spectrometry ◽  
Mass Resolution ◽  
High Mass ◽  
High Mass Resolution ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

A quantitative determination of the polymerization of benzoxazine thin coatings by time‐of‐flight secondary ion mass spectrometry

2019 ◽  
Vol 51 (6) ◽  
pp. 674-680 ◽  
Author(s):  
Eva Pospisilova ◽  
Alexis Renaud ◽  
Marc Poorteman ◽  
Marjorie Olivier ◽  
Ludovic Dumas ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Quantitative Determination ◽  
Secondary Ion Mass Spectrometry ◽  
Time Of Flight ◽  
Thin Coatings ◽  
Ion Mass Spectrometry ◽  
Secondary Ion
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