Organotin in Nonchemically Amplified Polymeric Hybrid Resist Imparts Better Resolution with Sensitivity for Next-Generation Lithography
2020 ◽
Vol 2
(5)
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pp. 1790-1799
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2009 ◽
Vol 129
(3)
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pp. 393-398
2000 ◽
Vol 18
(4)
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pp. 1119-1124
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2002 ◽
Vol 38
(1)
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pp. 95-100
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2007 ◽
Vol 43
(03)
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pp. 1
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