Time-Resolved Kinetic Monte-Carlo Simulation Study on Si (111) Etching
2007 ◽
Vol 111
(9)
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pp. 3566-3574
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2014 ◽
Vol 272
◽
pp. 1010-1017
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2015 ◽
Vol 119
(52)
◽
pp. 28871-28884
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2017 ◽
Vol 50
(33)
◽
pp. 335103
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2017 ◽
Vol 422
◽
pp. 1120-1128
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2012 ◽
Vol 116
(50)
◽
pp. 26349-26357
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2016 ◽
Vol 147
◽
pp. 128-136
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