Time-resolved two-dimensional profiles of electron density and temperature of laser-produced tin plasmas for extreme-ultraviolet lithography light sources
Kentaro Tomita
◽
Yuta Sato
◽
Syouichi Tsukiyama
◽
Toshiaki Eguchi
◽
Kiichiro Uchino
◽
...
Kouichiro Kouge
◽
Kentaro Tomita
◽
Junya Hotta
◽
Yiming Pan
◽
Hiroaki Tomuro
◽
...
2008 ◽
Vol 104
(1)
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pp. 013305
◽
S. Namba
◽
S. Fujioka
◽
H. Sakaguchi
◽
H. Nishimura
◽
Y. Yasuda
◽
...
2008 ◽
Vol 92
(1)
◽
pp. 73-77
◽
A. Takahashi
◽
D. Nakamura
◽
K. Tamaru
◽
T. Akiyama
◽
T. Okada
2012 ◽
Vol 11
(2)
◽
pp. 021104-1
◽
Guido Schriever
◽
Olivier Semprez
◽
Jeroen Jonkers
◽
Masaki Yoshioka
◽
Rolf Apetz
2008 ◽
Vol 92
(11)
◽
pp. 111503
◽
Hirokazu Sakaguchi
◽
Shinsuke Fujioka
◽
Shinichi Namba
◽
Hajime Tanuma
◽
Hayato Ohashi
◽
...
Peipei Tao
◽
Li Sheng
◽
Qianqian Wang
◽
Hao Cui
◽
Xiaolin Wang
◽
...
2019 ◽
Vol 52
(3)
◽
pp. 886-895
◽
Matthias S. Ober
◽
Duane R. Romer
◽
John Etienne
◽
P. J. Thomas
◽
Vipul Jain
◽
...
Bruno La Fontaine
◽
Adam R. Pawloski
◽
Obert Wood
◽
Yunfei Deng
◽
Harry J. Levinson
◽
...
2010 ◽
Vol 87
(11)
◽
pp. 2134-2138
◽
Chang Young Jeong
◽
Sangsul Lee
◽
Hyun-Duck Shin
◽
Tae Geun Kim
◽
Jinho Ahn
2005 ◽
Vol 44
(7B)
◽
pp. 5560-5564
◽
Sang-Ho Lee
◽
Young-Jae Kang
◽
Jin-Goo Park
◽
Ahmed A. Busnaina
◽
Jong-Myung Lee
◽
...
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