Laser-produced plasma versus laser-assisted discharge plasma: physics and technology of extreme ultraviolet lithography light sources

2012 ◽  
Vol 11 (2) ◽  
pp. 021104-1 ◽  
Author(s):  
Guido Schriever ◽  
Olivier Semprez ◽  
Jeroen Jonkers ◽  
Masaki Yoshioka ◽  
Rolf Apetz
Keyword(s):  
Plasma Physics ◽  
Discharge Plasma ◽  
Extreme Ultraviolet ◽  
Light Sources ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Laser Produced Plasma

Laser-produced plasma light source for extreme ultraviolet lithography

2013 ◽  
Vol 6 (1) ◽  
pp. 20-33
Author(s):  
窦银萍 DOU Yin-ping ◽  
孙长凯 SUN Chang-kai ◽  
林景全 LIN Jing-quan
Keyword(s):  
Light Source ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Laser Produced Plasma

Research progress on laser-produced plasma light source for 13.5 nm extreme ultraviolet lithography

2020 ◽  
Vol 13 (1) ◽  
pp. 28-42
Author(s):  
宗 楠 ZONG Nan ◽  
胡蔚敏 HU Wei-min ◽  
王志敏 WANG Zhi-min ◽  
王小军 WANG Xiao-jun ◽  
张申金 ZHANG Shen-jin ◽  
...  
Keyword(s):  
Light Source ◽  
Extreme Ultraviolet ◽  
Research Progress ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Laser Produced Plasma

Laser-Produced Plasma Light Source Development for Extreme Ultraviolet Lithography

2004 ◽  
Vol 43 (6B) ◽  
pp. 3707-3712 ◽  
Author(s):  
Hiroshi Komori ◽  
Georg Soumagne ◽  
Tamotsu Abe ◽  
Takashi Suganuma ◽  
Yousuke Imai ◽  
...  
Keyword(s):  
Light Source ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Laser Produced Plasma
Sign in / Sign up

Export Citation Format

Share Document